Taiwan Semiconductor Manufacturing Comp. Ltd.

Po-Jui Lin

Ke-Ying Su

Ze-Ming Wu

A method of manufacturing a semiconductor device, a corresponding layout diagram being stored on a non-transitory computer-readable medium, the layout diagram including layout cells, the method including generating the layout diagram including: for a candidate cell amongst the layout cells in the layout diagram, avoiding a discrete calculation of a corresponding parasitic capacitance (PC) description including, within a database which stores predefined cells and corresponding parasitic capacitance (PC) descriptions thereof, searching the database for one amongst the predefined cells (matching predefined cell) that is a substantial match to the candidate cell; and, when a substantial match is found, assigning the PC description of the matching predefined cell to the candidate cell.

Method of manufacturing semiconductor device and system for same

A method is disclosed for storing and reusing the PC description of layout cells. A database stores predefined cells and PC descriptions that were previously calculated by a 3D field solver. Regarding a candidate cell from the layout diagram, the database is searched for a substantial match amongst the predefined cells. If there is a match, then the stored PC description of the matching predefined cell is assigned to the candidate cell in the layout diagram, which avoids having to make a discrete calculation for the PC description. If there is no match, then the 3D field solver is applied to the candidate cell in order to calculate the PC description of the candidate cell. To facilitate reusing the newly calculated PC description, the candidate cell and the newly calculated PC description are stored in the database as a new predefined cell and its corresponding PC description.

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Hsinchu, Taiwan

Po-Jui Lin