Cts Corporation

Piyush Chaudhari

James Frank Caruba

Charles L Zimnicki

Theodore E Lind

A piezoelectric resonator (,) having a sacrificial mass-loading layer (,). Material is removed from the mass-loading layer (,) to raise a resonator frequency to a desired target. The sacrificial layer (,) is of a dense material, such as silver or gold, but is of such a relative thin layer that it can be used on high frequency aluminum electrodes (,) of a resonator (,) without increasing adverse spurious frequency problems. It is not necessary that the mass-loading layer (,) be conductive. In addition, the silver or gold sacrificial layer (,) can be removed by ion milling at practical and economical rates, unlike aluminum or aluminum oxide. Preferably, a diffusion barrier (,) is interposed between the electrodes (,) and the mass-loading layer (,).

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Carpentersville, IL, United States of America

Piyush Chaudhari