Solar-semi Gmbh

Obducat Ab

Süss Microtec Laboratory Equipment Gmbh

Obducat Europe Gmbh

Pirmin Muffler

A rotary plate for holding a substrate for a coating device, which rotary plate comprises a plurality of suction points, is intended to be characterized by an annular elevation, wherein a diameter of the annular elevation substantially corresponds to a diameter of the substrate.

Rotary plate for holding a substrate for a coating device

A device for lacquering or coating a substrate is disclosed. The device includes a substrate plate configured to accommodate said substrate, and one or more suction points connected to, and extending upwardly from, the substrate plate. The one or more suction points may be configured to provide a vacuum to said substrate.

Substrate plate

In a device for machining, in particular etching and/or developing, substrates, in particular wafers, in particular etching and/or developing, having a turntable, the turntable has a Venturi gap.

Device for machining a substrate and a method for this purpose

A method for applying a thin-walled, flat substrate, such as a wafer, to an assembly carrier with a preferably level protective layer, for example a wax. With respect to the protective layer, the substrate is arranged at a spacing and is curved in a convex manner. The substrate is contacted with the protective layer. Finally, the substrate is laid over the entire protective layer from the contact point towards the edge of the substrate.

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Orsingen-Nenzingen, Germany

Pirmin Muffler