Varian Semiconductor Equipment Associates, Inc.

Piortr R Lubicki

Joseph C Olson

Russell J Low

Eric D Hermanson

D Jeffrey Lischer

Steve Krause

An ion implantation system includes an ion source configured to provide an ion beam, a terminal structure defining a cavity, the ion source at least partially disposed within the cavity, and an insulator system. The insulator system is configured to electrically insulate the terminal structure and is configured to provide an effective dielectric strength greater than about 72 kilovolts (kV)/inch in a region proximate at least one exterior surface of the terminal structure. A gas box insulator system to electrically insulate a gas box of the ion implantation system is also provided.

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Peabody, MA, United States of America

Piortr R Lubicki