Industrial Technology Research Institute

Ping-Yin Liu

Hung-Yin Tsai

Chien-Chang Su

Chin-Hon Fan

Chih-Yung Cheng

Chun-Hao Hsieh

A process for making a diamond film with low surface roughness. A substrate is provided. A diamond layer is deposited on the substrate. A binder layer is coated over the diamond layer. A carrier plate is provided to join with the binder layer, thereby forming a laminate structure. The substrate is then removed, thereby obtaining a diamond film with a low surface roughness with respect to the surface roughness of the removed substrate.

Method for fabricating a diamond film having low surface roughness

A microelement piezoelectric feedback type picking and releasing device is constructed to include a piezoelectric material, an IDT (interdigital transducer) electrode plated and a progressive electrode plated on the piezoelectric material, the progressive electrode having a plurality of electrode elements of different sizes arranged in proper order in one direction, the IDT electrode forming a releasing unit by means of surface acoustic wave/ultrasonic wave and serving as a voltage signal feedback sensor for clamping force control.

Growing community of inventors

YungHo, Taiwan

Ping-Yin Liu