National Taiwan University

Ping-Yen Lin

Shiming Lin

Shu Kuan

Long-Sun Huang

Kuang-Chong Wu

Yi-Kuang Yen

Yu-Fu Ku

A system for compensating a thermal effect is provided and includes a substrate structure and a microcantilever. The substrate structure includes a first piezoresistor. The first piezoresistor is buried in the substrate structure and has a first piezoresistance having a first relation to a first variable temperature. The microcantilever has the thermal effect and a second piezoresistance having a second relation to the first variable temperature, wherein the thermal effect is compensated based on the first and the second relations.

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Taipei, Taiwan

Ping-Yen Lin