Advanced Micro-fabrication Equipment Inc, Shanghai

Other

Ping Yang

Xiaoming He

Zhaoyang Xu

Lei Wan

Hanting Zhang

Lei Tang

Yiwu Weng

Xiaojing Lv

Qianqian Zhang

Yuzhang Wang

An advanced coating for parts used in plasma processing chamber. The advanced coating is formed over an anodized surface that has not been sealed. After the coating is formed, the coated area is masked, and the remaining anodized surface is sealed. The porous and rough structure of the anodized but un-sealed aluminum enhances adhesion of the coating. However, to prevent particle generation, the exposed anodized surface is sealed after formation of the coating. The coating can be of yttria, formed by plasma enhanced atomic deposition techniques which results in a dense and smooth coating.

Coating packaged chamber parts for semiconductor plasma apparatus

The present invention relates to a passive type organic working fluid ejector refrigeration method. The liquid organic working fluid of the reservoir is added to evaporator using gravity. Then the refrigerant absorbs heat during evaporation in the evaporator. When the refrigerant temperature and pressure increases to a certain value, the self-operated pressure regulator valve automatically opens and the ejector begins to work. After condensing in the condenser, the working fluid divided into two streams. One stream returns to the reservoir and the other one flows into the cooling evaporator of refrigeration cycle to produce chilled water about 12&#xb0; C. When the liquid refrigerant is completely evaporated in the evaporator, the self-operated pressure regulator valve opens and the working fluid flows into the evaporator from the reservoir. A certain quality of the working fluid is closed in the evaporator, preparing for a new work cycle as above-mentioned. The system of the present invention can use organic fluid as the working fluid to utilize the low-temperature heat sources range from 60 to 200&#xb0; C., using groundwater, river (sea) water or air as cold source and using gravity to transport liquid working fluid.

Passive organic working fluid ejector refrigeration method

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Shanghai, China

Ping Yang