Taiwan Semiconductor Manufacturing Comp. Ltd.

Industrial Technology Research Institute

Winbond Electronics Corporation

Worldwide Semiconductor Manufacturing Corporation

Ping-Wei Wang

Yu-Kuan Lin

Feng-Ming Chang

Chih-Chuan Yang

Shih-Hao Lin

Chang-Ta Yang

Lien Jung Hung

Hsin-Wen Su

Kuo-Hsiu Hsu

Lien-Jung Hung

Chia-Hao Pao

Kian-Long Lim

Huai-Ying Huang

Jui-Lin Chen

Wen-Chun Keng

Hung-Jen Liao

Sheng Chiang Hung

Yen-Huei Chen

Wei-Cheng Wu

Wei Min Chan

Kuo-Hung Lo

Chao-Yuan Chang

Ruey-Wen Chang

Mei-Yun Wang

Kuo-Yi Chao

Yee-Chia Yeo

Kong-Beng Thei

Fu-Liang Yang

Chenming Hu

Choh Fei Yeap

Chun-Yi Lee

Hao-Yu Chen

Yuh-Jier Mii

Shau-Wei Lu

Jordan Hsu

Lie-Yong Yang

Chia-En Huang

Chii-Ming M Wu

Harry Chuang

Jui-Wen Chang

Fu-Kai Yang

I-Wen Wu

Chenchen Jacob Wang

Gwan Sin Chang

Chih-Hsuan Chen

Ying-Hsiu Kuo

Ting Fang

Shang-Rong Li

Harry-Hak-Lay Chuang

Tsung-Lin Lee

Chang-Yun Chang

Chia-Fu Lee

Ching-Wei Wu

Chi-Yu Lu

Jui-Jen Wu

Min Cao

Sheng-Hsiung Wang

Chia-en Huang

Cheng-Hung Lee

Fang-Shi Jordan Lai

Hsiang-Lin Chen

Ming-Yen Chuang

Cheng-Hung Yeh

Dao-Ping Wang

Tzu-Kuei Lin

Chong-De Lien

Po-Sheng Lu

Hsing Chen

Tang-Xuan Zhong

Wesley Lin

Yuan-Hao Chang

Ting Chou

Shu-Hsuan Lin

Hsin-Li Cheng

Chang-Da Yang

Sheng Chi Lin

Spring Yeh

Pie-Yu Jeang

Cheng Hung Yeh

Huai-Yang Huang

In some embodiments, the present disclosure relates to a one-time program (OTP) memory cell. The OTP memory cell includes a read transistor and a program transistor neighboring the read transistor. The read transistor includes a read dielectric layer and a read gate electrode overlying the read dielectric layer. The program transistor includes a program dielectric layer and a program gate electrode overlying the program dielectric layer. The program transistor has a smaller breakdown voltage than the read transistor.

Controlling trap formation to improve memory window in one-time program devices

A method includes forming a first fin protruding from a substrate in a first region of the substrate and a second fin protruding from the substrate in a second region of the substrate, recessing a portion of the first fin, thereby forming a first recess, recessing a portion of the second fin, thereby forming a second recess, depositing a blocking layer in the second recess, growing a base epitaxial layer in the first recess, removing the blocking layer from the second recess, and growing a doped epitaxial layer in the first recess and the second recess. The base epitaxial layer is dopant free. The doped epitaxial layer abuts the first fin in the first region and the second fin in the second region.

Epitaxial features in semiconductor devices and method of forming the same

A method of manufacturing a semiconductor device includes forming a fin, the fin having an epitaxial portion and a base portion protruding from a substrate. Sidewalls of the base portion are tapered with respect to sidewalls of the epitaxial portion. The method also includes depositing a polymeric material on the sidewalls of the epitaxial portion, performing an etching process to modify a profile of the sidewalls of the base portion, such that the sidewalls of the base portion are laterally recessed with a narrowest width of the base portion located under a top surface of the base portion, removing the polymeric material from the sidewalls of the epitaxial portion, depositing an isolation feature on the sidewalls of the base portion, and forming a gate structure engaging the epitaxial portion.

Semiconductor device with leakage current suppression and method of forming the same

A memory device includes a substrate, an active region, a first gate structure, a second gate structure, a first word line, and a second word line. The active region protrudes from a top surface of the substrate. The active region has at least one ring structure, in which when viewed from above, the ring structure has a first linear portion, a second linear portion, a first curved portion, and a second curved portion, the first curved portion connects first sides of the first and second linear portions, and the second curved portion connects second sides of the first and second linear portions. The first gate structure and the second gate structure are over the substrate and cross the active region. The first word line and the second word line are electrically connected to the first gate structure and the second gate structure, respectively.

Memory device and method for forming the same

A memory device includes a memory array having a plurality of memory cells. Each memory cell of the plurality of memory cells is connected to a word line to apply a first signal to select the memory cell to read data from or write the data to the memory cell and a bit line to read the data from the memory cell or provide the data to write to the memory cell upon selecting the memory cell by the word line. A first bit line portion of the bit line connected to a first memory cell of the plurality of memory cells abuts a second bit line portion of the bit line connected to a second memory cell of the plurality of memory cells. The first memory cell is adjacent to the second memory cell.

Macro and SRAM bit cell cooptimizatoin for performance (long/shortwordline combo SRAM)

Some embodiments relate to a memory device. The memory device includes a transistor having a first source/drain (S/D) region and a second S/D region, a first S/D contact disposed over the first S/D region, the first S/D contact extending lengthwise in a first direction, a second S/D contact disposed over the second S/D region, a first via landing on the first S/D contact, the first via extending lengthwise in a second direction different from the first direction, a second via landing on the second S/D contact, the first via having a length measured in the second direction that is larger than the second via, a first conductive line coupled to the first via, a second conductive line coupled to the second via, and a memory structure disposed above the transistor and coupled to the second conductive line.

Memory device and method of forming the same

Disclosed herein are related to a memory cell including magnetic tunneling junction (MTJ) devices. In one aspect, the memory cell includes a first layer including a first transistor and a second transistor. In one aspect, the first transistor and the second transistor are connected to each other in a cross-coupled configuration. A first drain structure of the first transistor may be electrically coupled to a first gate structure of the second transistor, and a second drain structure of the second transistor may be electrically coupled to a second gate structure of the first transistor. In one aspect, the memory cell includes a second layer including a first MTJ device electrically coupled to the first drain structure of the first transistor and a second MTJ device electrically coupled to the second drain structure of the second transistor. In one aspect, the second layer is above the first layer.

Static random access memory with magnetic tunnel junction cells

An integrated circuit structure in which a gate overlies channel region in an active area of a first transistor. The first transistor includes a channel region, a source region and a drain region. A conductive contact is coupled to the drain region of the first transistor. A second transistor that includes a channel region, a source region a drain region is adjacent to the first transistor. The gate of the second transistor is spaced from the gate of the first transistor. A conductive via passes through an insulation layer to electrically connect to the gate of the second transistor. An expanded conductive via overlays both the conductive contact and the conductive via to electrically connect the drain of the first transistor to the gate of the second transistor.

Compact electrical connection that can be used to form an SRAM cell and method of making the same

A memory cell includes first through fifth gate structures that each extend along a first lateral direction, a first active structure extending along a second lateral direction and overlaid by respective first portions of the first to fourth gate structures, a second active structure extending along the second lateral direction and overlaid by respective second portions of the first to fourth gate structures, and a third active structure extending along the second lateral direction and overlaid by respective third portions of the third and fifth gate structures. In some embodiments, the first and second gate structures are aligned with each other, with the fourth and fifth gate structures aligned with a first segment and a second segment of the third gate structure, respectively. In some embodiments, the second lateral direction perpendicular to the first lateral direction.

SRAM design with four-poly-pitch

The present disclosure describes a method for memory cell placement. The method can include placing a memory cell region in a layout area and placing a well pick-up region and a first power supply routing region along a first side of the memory cell region. The method also includes placing a second power supply routing region and a bitline jumper routing region along a second side of the memory cell region, where the second side is on an opposite side to that of the first side. The method further includes placing a device region along the second side of the memory cell region, where the bitline jumper routing region is between the second power supply routing region and the device region.

Static random access memory layout

A method includes receiving a workpiece. The workpiece includes a first dummy gate, a second dummy gate adjacent the first dummy gate, a first gate spacer disposed along sidewalls of the first dummy gate, and a second gate spacer disposed along sidewalls of the second dummy gate. The method further includes removing the first dummy gate and the second dummy gate to form a first gate trench and a second gate trench, respectively, enlarging the first gate trench and the second gate trench, forming a first metal gate structure in the enlarged first gate trench, and forming a second metal gate structure in the enlarged second gate trench. The enlarged second gate trench is wider than the enlarged first gate trench.

Semiconductor memory structure

A method includes forming a first semiconductor fin and a second semiconductor fin over a substrate; forming a first gate structure over the substrate and crossing the first semiconductor fin; forming a second gate structure over the substrate and crossing the second semiconductor fin; forming a first gate spacer on a sidewall of the first gate structure; and forming a second gate spacer on a sidewall of the second gate structure, wherein in a top view, an outer sidewall of the first gate spacer farthest from the first gate structure is coterminous with an outer sidewall of the second gate spacer farthest from the second gate structure, and an inner sidewall of the first gate spacer in contact with the first gate structure is misaligned with an inner sidewall of the second gate spacer in contact with the second gate structure.

The present disclosure describes a memory structure including a memory cell array. The memory cell array includes memory cells and first n-type wells extending in a first direction. The memory structure also includes a second n-type well formed in a peripheral region of the memory structure. The second n-type well extends in a second direction and is in contact with a first n-type well of the first n-type wells. The memory structure further includes a pick-up region formed in the second n-type well. The pick-up region is electrically coupled to the first n-type well of first n-type wells.

Shared pick-up regions for memory devices

A device includes a substrate, a contact, a first gate, a second gate, a dielectric feature between the gates, a via, and a conductive line. The gates are each adjacent the contact and aligned lengthwise with each other along a first direction. A first sidewall of the dielectric feature defines an end-wall of the first gate. A second sidewall of the dielectric feature defines an end-wall of the second gate. The conductive line extends along a second direction. A projection of the conductive line onto a top surface of the dielectric feature passes between the first and second sidewalls. The via interfaces with the contact along a second plane. The via has a first dimension on the second plane along the second direction; the contact has a second dimension on the second plane along the second direction. The first dimension is greater than the second dimension.

Integrated circuit device with reduced via resistance

A memory device includes a substrate, a first transistor and a second transistor, a first word line, a second word line, and a bit line. The first transistor and the second transistor are over the substrate and are electrically connected to each other, in which each of the first and second transistors includes first semiconductor layers and second semiconductor layers, a gate structure, and source/drain structures, in which the first semiconductor layers are in contact with the second semiconductor layers, and a width of the first semiconductor layers is narrower than a width of the second semiconductor layers. The first word line is electrically connected to the gate structure of the first transistor. The second word line is electrically connected to the gate structure of the second transistor. The bit line is electrically connected to a first one of the source/drain structures of the first transistor.

Semiconductor device including alternating semiconductor layers with different widths and method for forming the same

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Hsin-Chu, Taiwan

Ping-Wei Wang