Taiwan Semiconductor Manufacturing Comp. Ltd.

Ping-Shen Chou

Cheng-Ping Chen

Tsung-Lung Lai

Chun Yan Chen

Ching-Wen Cheng

A fitting for an upper brush in a double brush scrubbing chamber of a wafer cleaning system is disclosed. The fitting includes a base plate, a flanged pipe, and a threaded connector. The base plate includes a threaded hole with a stop surface therein and a channel extending from the stop surface through a lower surface of the base plate. The flanged pipe is inserted into the base plate such that the flange at the top end of a hollow tube rests on the stop surface and the hollow tube passes through the channel of the base plate. The threaded connector has a passage therethrough, and engages the threaded hole of the base plate to fix the flanged pipe in place. This structure is able to provide fluid while minimizing particle generation.

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Hsinchu, Taiwan

Ping-Shen Chou