Asml Netherlands B.v.

Xerox Corporation

Pieter Mulder

Danny Maria Hubertus Philips

John Barry Poxon

Clemens Johannes Gerardus Van Den Dungen

Erik Henricus Egidius Catharina Eummelen

Paulus Martinus Maria Liebregts

Johannes Catharinus Hubertus Mulkens

Martinus Hendrikus Antonius Leenders

Marcel Beckers

Cédric Désiré Grouwstra

Richard Moerman

Ian Pitts

Nicholas Baxter

Evert Van Vliet

Nicolaas Franciscus Koppelaars

Martin Callis

Riley Brede

Remko Jan Peter Verhees

Daniel Jozef Maria Direcks

Scott M Potter

Marcus Johannes Van Der Zanden

Maikel Adrianus Cornelis Schepers

Nicolaas Rudolf Kemper

Sergei Shulepov

Ronald Van Der Ham

Koen Steffens

Wilhelmus Franciscus Johannes Simons

Marco Baragona

David Bessems

Han Henricus Aldegonda Lempens

Jimmy Matheus Wilhelmus Van De Winkel

Paul Petrus Joannes Berkvens

Gert-Jan Gerardus Johannes Thomas Brands

Jan Willem Cromwijk

Derek J Milton

Daniël Jozef Maria Direcks

Ferdinand Bernardus Johannus Wilhelmus Maria Hendriks

Stuart John Handley

Tim Spink

Julian Derek Morrison

Marjan Leonardus Catharina Hoofman

An immersion lithographic apparatus is disclosed that includes a fluid supply system configured to supply a fluid, the fluid supply system having a chamber with a plurality of inlet holes in a first side wall and a plurality of outlet holes in a second side wall, the first side wall facing the second side wall, wherein the inlet holes direct fluid entering the chamber in a direction towards areas of the second side wall between the plurality of outlet holes.

Lithographic apparatus

In a liquid confinement structure of an immersion lithographic apparatus an elongate continuous opening forms an outlet for supplying liquid to a space beneath the projection system. The elongate slit forms a region of high shear and pressure gradient that deflects bubbles away from the image field.

Lithographic apparatus and a device manufacturing method involving an elongate liquid supply opening or an elongate region of relatively high pressure

An immersion lithographic apparatus is disclosed having a projection system configured to direct a patterned beam of radiation onto a substrate and a liquid handling system configured to supply and confine immersion liquid to a space defined between the projection system and a substrate, or a substrate table, or both. A controller is provided to adjust an angle of a lower surface of the liquid handling system relative to the top surface of the substrate during motion of the substrate and/or substrate table relative to the liquid handling system dependent upon a position of the substrate and/or substrate table relative to the liquid handling system and/or a direction of relative movement between the substrate and/or substrate table and the liquid handling system.

Lithographic apparatus, a method of controlling the apparatus and a device manufacturing method

A fluid handling structure configured to supply immersion liquid to a space defined between a projection system and a facing surface facing the fluid handling structure is disclosed. An undersurface of the fluid handling structure has a supply opening configured to supply fluid toward the facing surface, a plurality of extraction openings configured to remove fluid from between the fluid handling structure and the facing surface, and a protrusion between the supply opening and the extraction openings.

Fluid handling structure, lithographic apparatus and a device manufacturing method

An immersion lithographic apparatus is described in which a droplet removal device removes droplets from the substrate, e.g. during exposures, using an angled flow of gas from a gas knife.

Immersion lithographic apparatus and device manufacturing method

A toner dam maintenance process and system model the amount of toner mass at a toner cleaner blade, and apply a corrective procedure, such as insertion of a paperless copy into the print job mid-job or immediately prior to cycle out, to replenish the toner mass at the cleaner blade to maintain lubrication and reduce cleaning failure. The modeling includes contributing factors toward toner dam input and output, including untransferred toner, cycle-in/cycle-out bands, untransferred background, and leakage of toner from the cleaner blade. One or several threshold can be reached to cause one or more different corrective actions to take place. The action may be adding or skipping a pitch to insert a corrective maintenance pattern without transfer.

Blade maintenance process and system for maintaining adequate toner dam

A web cleaning system for a fuser system includes a web which is biased into contact with a rotating cylindrical member, such as a fuser roll, as the fuser roll is rotated about its axis of rotation. A lateral displacement system displaces the web, relative to the cylindrical member, in a direction parallel to the axis of rotation of the cylindrical member. In this way, regions of the web which have become contaminated with collected toner are shifted laterally, thus avoiding oversaturation of the web.

Axially translating web cleaning system for a fuser

A fuser apparatus includes first and second rolls rotatably mounted parallel to and in contact with each other to form a nip through which print media with a toner image thereon is passed to fuse the image to the print media. A cleaning system is provided for cleaning one of the rolls, such as the fuser roll. The cleaning system includes a rotatably mounted cleaning roll, an outer surface thereof including a pile. A flicker bar is arranged to detach toner from the pile.

Cleaning system for a fuser apparatus

A roll useful in fusing marking material to a print sheet includes a coating disposed on at least a portion of the inner surface thereof. A lamp disposed inside the roll supplies radiant energy to the inner surface. The coating changes its absorptivity (such as color) as desired, to obtain specific desired temperatures at different portions of the roll. The coating can be thermochromic, changing its absorptivity in response to local temperature; or electrochromic, changing its absorptivity in response to an external electrical stimulus.

Printing roll having a controllable heat absorbing internal surface

Printing roll having a controllable heat-absorbing internal surface

A fusing apparatus includes a fuser roll and a pressure roll which define a nip therebetween. Two heating elements heat the fuser roll. One of the heating elements is configured for heating a first portion of the fuser roll while a second of the heating elements is configured for heating a second portion of the fuser roll. The second portion of the fuser roll is axially spaced from the first portion. A temperature sensing system monitors a temperature of the fuser roll in a first location and monitors a temperature of the fuser roll in a second location which is axially spaced from the first location. A control system determines an amount of power to supply to the first heating element as a function of the monitored temperatures at the first and second axially spaced locations and determines an amount of power to supply to the second heating element as a function of the monitored temperatures at the first and second axially spaced locations.

Multivariate predictive control of fuser temperatures

Growing community of inventors

Duizel, Netherlands

Pieter Mulder