Nxp B.v.

Piet Wessels

Naveen Agrawal

Jayaraj Thillaigovindan

Gaurav Singh Bisht

Jerome Dubois

Eric Ooms

Nico Berckmans

Khin Hoong Lim

Michael John Ben Bolt

Jerome Guillaume Anna Dubois

Jie Liao

Jerôme Guillaume Anna Dubois

A method of manufacturing a semiconductor device includes forming a trench that includes a needle defect, depositing a high density plasma oxide over the trench including the needle defect, removing the part of the high density oxide and the liner oxide over the needle defect by applying an oxide etch, and after the step of applying the oxide etch, etching back the needle defect by applying a polysilicon etch.

Method for reducing defects in shallow trench isolation

A high-voltage metal capacitor with easy integration into existing semiconductor manufacturing processes can provide isolation capacitors up to several kilovolts. The capacitor includes a support layer with internal structure, including a lower place, a bond pad on the support layer, an upper plate disposed on the support layer, the upper plate being arranged above the lower plate, a dielectric layer, at least part of which is between the lower and upper plates, and a passivation layer, at least part of which covers at least part of the upper plate and part of the dielectric layer. A first opening extends from the surface through the passivation and dielectric layers to the lower plate, and a second opening extends from the surface through the passivation layer to the upper plate. A method of manufacturing the capacitor.

High-voltage integrated metal capacitor and fabrication method

Disclosed is an integrated circuit die comprising an active substrate including a plurality of components laterally separated from each other by respective isolation structures, at least some of the isolation structures carrying a further component, wherein the respective portions of the active substrate underneath the isolation structures carrying said further components are electrically insulated from said components. A method of manufacturing such an IC die is also disclosed.

Integrated circuit and IC manufacturing method

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Nijmegen, Netherlands

Piet Wessels