Societe Qualiflow Sa

Pierre Navratil

Alain Giani

Andr&eacute; Boyer

Pascal Rudent

Alain Gotas

Construction of a micro-thermocouple sensor designed to be incorporated in a mass flow meter for the circulation of gaseous fluids, includes of the following steps: depositing an insulating layer of several microns by electron gun on the sensor tube, then depositing the components of the thermocouple, by the electron gun, through the nickel masks, at a residual pressure lower than 10 torr, at a thickness of several thousand Angstroms, annealing of the capillary tube for one hour, then the mounting of a heating element on the capillary tube treated in this manner.

Micro-thermocouple for a mass flow meter

The sensor ( ) for a mass flow meter ( ) including a capillary tube ( ) for circulation of fluid in parallel with the principal circuit of the fluid circulation. The sensor includes heating mechanisms ( ) of the capillary tube ( ) and mechanisms for measuring the temperature ( ), upstream and downstream from this heating mechanism ( ), and separate from the heating mechanism. The mechanisms for measuring the temperature ( ) are two resistors manufactured by deposition in an external manner on the sensor tube ( ), one of them (22) upstream from the heating mechanism ( ), the other ( ) downstream from the heating mechanism. The manufacturing process includes stages of deposition by an electron gun, firstly of a layer of zirconia ( ) of several microns, on the tube ( ) made of stainless steel, then of the sensitive components ( ) and the contacts ( ) of the measurement resistors ( ), made of platinum, and defined by masks of nickel.

Sensor for a capillary tube of a mass flow meter

A fluid circuit sealing apparatus having a valve body with a valve base having a fluid inlet pipe and a fluid discharge pipe extending therethrough, a diaphragm having a cup shape, and a piston engageable with the diaphragm so as to deform the diaphragm so as to rest upon a seat provided on a rim of the inlet pipe. The diaphragm is clamped on an edge thereof between the valve body and the clamping cover. The diaphragm has a raised circumferential rim which forms an angle with a bottom of the diaphragm. The diaphragm has a parabolic dome. The raised circumferential rim has a circular upward fold portion extending to a slanting annular portion. The slanting annular portion is connected to the parabolic dome by a circular fold. The circular fold extends around a periphery of the parabolic dome.

Growing community of inventors

Montpellier, France

Pierre Navratil