Commissariat a L'energie Atomique Et Aux Energies Alternatives

California Institute of Technology

Commissariat À L'énergie Atomique Et Aux Énergies Alternatives

Pierre Brianceau

Nicolas Posseme

Michael Roukes

Jean-Marc Fedeli

Laurent Duraffourg

Sebastien Hentz

Philippe Andreucci

Sébastien Hentz

Edward B Myers

Yann Bogumilowicz

Carine Marcoux

Thomas Magis

Alexis Abraham

Ségolène Olivier

Ségoléne Olivier

Stephane Minoret

Elisa Vermande

Stéphane Minoret

A method for activating an exposed layer of a structure including a provision of a structure including an exposed layer, a deposition of a layer based on a material of formula SiYX, with X chosen from among fluorine F and chlorine Cl, and Y chosen from among oxygen O and nitrogen N, a, b and c being non-zero positive integers, a treatment of the layer SiYXby an activation plasma based on at least one from among oxygen and nitrogen, the parameters of the deposition of the layer SiYXbeing chosen so as to obtain a sufficiently low material density such that the layer SiYXis at least partially consumed by the activation plasma.

Method for activating an exposed layer

A method of manufacturing an optical waveguide with a vertical slot including the steps of a) providing a substrate successively including an electric insulator layer and a crystalline semiconductor layer, b) forming a trench on the semiconductor layer to expose the electric insulator layer and defining first and second semiconductor areas on either side, step b) being executed so that the first semiconductor area has a lateral edge extending across the entire thickness of the semiconductor layer, c) forming the dielectric layer having the predetermined width across the entire thickness of the lateral edge, the method being remarkable in that the trench formed at step b) is configured so that the second semiconductor area forms a seed layer.

Optical waveguide manufacturing method

A nano electro-mechanical system (NEMS) formed on a substrate is provided including at least one fixed part associated with the substrate and at least one movable part in relation to the substrate, the system including a transduction component configured to excite the movable part to confer on it a movement and/or to detect a movement of the movable part, the transduction component including at least one electrically conductive material. The electrically conductive material is made of an AlSi alloy based deposition, the deposition being supported at least in part by the movable part of the system.

NEMS comprising AlSi alloy based transducer

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Biviers, France

Pierre Brianceau