Centre National De La Recherche Scientifique

Université De Limoges

Memscap

Airmems

Commissariat a L'energie Atomique

Thales

Pierre Blondy

Olivier Vendier

Romain Stefanini

Ling Yan Zhang

Francois Baleras

Jean-Louis Cazaux

Abedel Halim Zahr

Bertrand Guillon

Jean-Christophe Orlianges

Kevin Nadaud

Fabien Roubeau

Bertand Guillon

Arnaud Pothier

Stanis Courreges

Jean-François Villemazet

Kévin Nadaud

Jonathan Gauvin

A radio frequency micro-electromechanical switch (RF MEMS switch) is described. Also described is a method of producing such an RF MEMS switch. The method can include depositing on a substrate a first sacrificial layer and producing a pattern. A first layer of metal is deposited on the first sacrificial layer and on the substrate. A pattern is produced to form a first RF line and a first MEMS membrane. A second sacrificial layer is deposited on the first RF line and a pattern is produced. A dielectric layer is deposited on the second sacrificial layer and then a pattern is produced to form a dome. The first and second sacrificial layers are removed through a dome opening. A second metal layer is deposited on the dome and on the substrate, and then a pattern is produced to plug the dome opening(s) and to form a second RF line.

Method for manufacturing variable radio frequency micro-electromechanical switch

A microelectromechanical system switch includes a signal input line, a signal output line, a deformable conducting membrane electrically connected to the signal output line and including a contact dimple facing the signal input line, and an actuation electrode. The membrane has a planar round shape, with a radial opening in the direction of the signal input line, narrowing from the periphery towards the center of the membrane, the contact dimple being formed in the central region of the membrane, the actuation electrode has the same shape as the membrane, and the gap between the membrane, facing the actuation electrode, and the actuation electrode is an airgap only.

Robust microelectromechanical switch

The present invention relates to an microelectromechanical system () comprising: a base () comprising a substrate () and a substrate electrode (); a moveable beam (); a voltage generator () able to generate a potential difference between the beam () and the substrate electrode (); and at least one mechanical stop () connected to the beam and designed to make contact with the base () when a potential difference is applied between the beam () and the substrate electrode (), thereby defining an air-filled cavity () between the beam () and the substrate electrode (), characterized in that it furthermore comprises an electrical-charge blocking element () placed on the substrate (), said element facing the at least one mechanical stop () and being electrically connected to the beam ().

Electromechanical microsystems with air gaps

The invention relates to a frequency filter including a structure with, on one face, two extreme evanescent areas and at least one wave guide area between the evanescent areas. The at least one wave guide area and the evanescent areas form a single closed cavity. The single cavity is partitioned by at least two resonator elements that are embedded in the single cavity at placement areas and that contribute to delimiting the at least one wave guide area and the evanescent areas.

Frequency filter and its manufacturing process

A microcomponent which includes a capacitive component, of at least two elementary capacitors (C , C , C , C ) which are connected in series. Each elementary capacitor is made up of two plates namely: a plate ( ) fixed with respect to the rest of the microcomponent; and a second plate ( ), part of which is capable of being displaced with respect to the first fixed plate ( ) due to the effect of a control signal, so as to vary the value of the capacitance of the elementary capacitor C . The control signals for the various elementary capacitors are generated independently so as to vary the overall capacitance of the capacitor by independent variation of the capacitances of each elementary capacitor.

Microcomponent including a capacitive component

An elementary electrical resonator which includes a ribbon conductor forming a flat loop with at least one turn, the conductor having ends which form two parallel segments. The resonator further includes a conducting bridge which forms an arch straddling the two parallel segments of the ribbon conductor wherein opposing surfaces of the arch and the parallel segments form a capacitor. A part of the bridge is capable of being displaced with respect to the parallel segments under the action of a control signal so as to cause the capacitance of the capacitor and therefore the tuning frequency of the resonator to vary.

Electrical resonator with a ribbon loop and variable capacitors formed at the parallel ends

Growing community of inventors

Limoges, France

Pierre Blondy