Riber

Pierre-André Nutte

Jean Fompeyrine

Jean-Pierre A Locquet

Heinz Siegwart

Catherine Chaix

Alain Jarry

The invention concerns a material evaporation chamber including a vacuum chamber (), a first pumping unit () to pump said chamber and sources of material. According to the invention, a wall () liable to provide total or partial vacuum tightness, delineates within this chamber a first volume () and a second volume (). Certain sources of material () having a main axis () are placed in the second volume (). This second volume () is pumped by a second pumping unit (). The wall () includes recesses () which are each centered on the main axis () of one of the sources of material (). The evaporation chamber also comprises means () for plugging or clearing each of said recesses (), said means () being controlled individually to protect the sources of material () having a main axis () unused.

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Paris, France

Pierre-André Nutte