Other

University of California

Phillip J Batson

Patrick P Naulleau

James H Underwood

Rupert C C Perera

Paul E Denham

Michael S Jones

A reflectometer device for determining the quality characteristics of an electronic chip mask blank utilizing a source of electromagnetic radiation in the extreme ultraviolet region. The source is passed to a monochrometer which includes a mirror, a rotatable grating, and an exit slit. The radiation travels to the mirror and is reflected to the grating which, in turn, provides a source of electromagnetic radiation which is essentially continuous and of a particular bandwidth. The grating is rotated to tune such source of electromagnetic radiation which is passed to the subject blank mask. Upon reflection from the mask, a detector determines the intensity of the reflected beam from the mask and translates such measurement into a determination of reflectivity.

Reflectometer device

A vacuum compatible CCD-based microscopic camera with an integrated illuminator. The camera can provide video or still feed from the microscope contained within a vacuum chamber. Activation of an optional integral illuminator can provide light to illuminate the microscope subject. The microscope camera comprises a housing with a objective port, modified objective, beam-splitter, CCD camera, and LED illuminator.

Miniature self-contained vacuum compatible electronic imaging microscope

Growing community of inventors

Alameda, CA, United States of America

Phillip J Batson