Commissariat &#xc0; L'&#xc9;nergie Atomique Et Aux &#xc9;nergies Alternatives

Commissariat a L'energie Atomique

Stmicroelectronics S.a.

Peugeot Citroen Automobiles Sa

Michelin Recherche Et Technique S.a.

Politecnico Di Milano

Societe Detechnologie Michelin

Philippe Robert

Arnaud Walther

Bernard Diem

Guillaume Jourdan

Patrice Rey

Sébastien Hentz

Pascal Ancey

Jean-Sébastien Danel

Grégory Caruyer

Stephane Fanget

Bruno Fain

Maxime Pauly

Guillaume Bouche

Laurent Clavelier

Sebastien Hentz

Loic Joet

Vincent Larrey

Giacomo Langfelder

Loïc Joet

Olivier Redon

Audrey Berthelot

Bernard Bavoux

Valérie Nguyen

Hubert Grange

Marc Sansa Perna

Francois Perruchot

Sophie Giroud

Jérôme Willemin

Stéphane Fanget

Jean-Philippe Polizzi

Thierry Verdot

Caroline Coutier

France Michel

Dirk Ettelt

Remy Dejaeger

Cecilia Dupre

François Perruchot

Stephanus Louwers

Cécilia Dupre

Rémy Pauly, Legal Representative

Ida Elsa Meneguz, Legal Representative

Aboubacar Chaehoi

Laurent Duraffour

Stefano Dellea

Antonio F Longoni

Rémy Dejaeger

The present description concerns a clock signal generation device () comprising: a microelectromechanical resonant element (); and at least one nanoelectromechanical transduction element ().

Clock device

In an assembly between a MEMS and/or NEMS electromechanical component and a casing, the electromechanical component includes at least one suspended and movable structure which is provided with at least one fixing zone, on which a region for receiving the casing is fixed, the suspended structure being at least partially formed in a cover for protecting the component or in a layer which is different from the one in which a sensitive element of the component is formed.

Use of an uncoupling structure for assembling a component having a casing

Piezoresistive detection resonant device comprising a substrate, a mobile par configured to move with respect the substrate, suspension elements suspending the mobile part to the substrate, a piezoresistive detection device to detect the motions of the mobile part, said piezoresistive detection device comprising at least one strain gauge, wherein the piezoresistive detection resonant device also comprises a folded spring with at least two spring arms, connected to the mobile part and configured to be deformed by the motion of the mobile part, the at least one gauge being suspended between the substrate and the folded spring in such manner that the deformation of the gauge is reduced compared to the motion of the mobile part.

Piezoresistive detection resonant device in particular with large vibration amplitude

A microelectronic device including a substrate including, in a stack, a base portion, a dielectric portion and an upper layer with a semi-conductive material base, at least one electrical connection element made of an electrically conductive material located above the upper layer and electrically insulated from the upper layer at least by a dielectric layer, the dielectric layer being in contact with the surface of the upper layer, at least one dielectric element including at least one trench forming a closed edge at the periphery or upright of at least one portion of the dielectric electrical connection element, located at least partially in the upper layer and delimiting a closed zone of said upper layer, at least one dielectric element having a portion exposed to the surface of the upper layer, device wherein the dielectric layer totally covers the exposed portion of at least one dielectric element.

Reducing parasitic capacities in a microelectronic device

An acoustic microelectronic device includes a support, a set of at least one membrane suspended on a face of the support above a cavity by an anchoring zone, and at least one acoustic insulation trench arranged adjacent to the membrane. The device includes at least one bridge connecting the portions of two opposite edges of the trench and located overhanging at least one zone of the trench so as to form, in the zone of the trench, an acoustic insulation box below the bridge.

Acoustic microelectronic device

A device for measuring a characteristic of a fluid includes a sensor comprising a first main face furnished with a sensitive part sensitive to said characteristic and intended to be in contact with the fluid, and a second main face opposite furnished with a first electrical contact element on which a measurement signal is obtained. The device also includes a support comprising a first main face provided with a second electrical contact element linked electrically to the first electrical contact element, a second main face opposite, and an opening passing through the main faces of the support. The device further includes a cap fastened to the second main face of the sensor and delimiting, with this second main face, a cavity closed hermetically facing which is disposed the sensitive part of the sensor; in which the second main face of the sensor is fastened hermetically and/or in a leaktight manner to that of the support at the periphery of the opening, a part of the first electrical contact element being opposite and/or in the opening.

Device for measuring characteristics of a fluid

An electromechanical pressure sensor system, in particular microphone type, including an electromechanical transducer, signal processing device, a substrate for receiving at least one support of the electromechanical transducer and/or signal processing device, a protective cover arranged on the upper face of the substrate, the support of the electromechanical transducer and/or signal processing device being housed in at least one cavity located on the lower face of the substrate is disclosed.

Pressure sensor, in particular a microphone with improved layout

Linear accelerometer comprising a fixed part, a rotationally moving part in the plane of the accelerometer around an axis of rotation orthogonal to the plane of the accelerometer, the moving part comprising a centre of gravity distinct from the point of intersection of the axis of rotation and the plane of the accelerometer, means forming pivot link between the moving part and the fixed part, means for detecting the displacement of the moving part with respect to the fixed part, means for viscous damping the displacement of the moving part in said plane, said viscous damping means comprising interdigitated combs, at least one first comb on the moving part and at least one second comb on the fixed part (), the first comb and the second comb being interdigitated.

Damped linear accerelometer

A MEMS and/or NEMS pressure sensor including, in a substrate: a stationary portion and a portion movable relative to the stationary portion, the movable portion including a sensitive element configured to move in the plane of the sensor under effect of a pressure variation; a stress gauge detecting movement of the sensitive element in the plane of the sensor due to the pressure variation; electrodes actuating the sensitive element, the actuating electrodes being borne partially by the stationary portion and partially by the movable portion, the actuating electrodes being commanded to automatically control positionwise the movement of the sensitive element; a mechanism commanding the actuating electrodes, which is configured, on the basis of signals emitted by the gauge, to bias the actuating electrodes to automatically control positionwise the movement of the sensitive element.

Dynamic pressure sensor with improved operation

The invention provides a method of fabricating an electromechanical structure presenting a first substrate including a layer of monocrystalline material covered in a sacrificial layer that presents a free surface, the structure presenting a mechanical reinforcing pillar in the sacrificial layer, the method including etching a well region in the sacrificial layer to define a mechanical pillar; depositing a first functionalization layer of the first material to at least partially fill the well region and cover the free surface of the sacrificial layer around the well region; depositing a second material different from the first material for terminating the filling of the well region to thereby cover the first functionalization layer around the well region, planarizing the filler layer, the pillar being formed by the superposition of the first material and second material in the well region; and releasing the electromechanical structure by removing at least partially the sacrificial layer.

Method of fabricating an electromechanical structure including at least one mechanical reinforcing pillar

A measuring circuit for a multisensory detector is provided, including a plurality of detection branches mounted in parallel, with each detection branch of said plurality of detection branches including at least two dipoles mounted in series, and at least one reference branch, including a polarizing source and another at least two dipoles mounted in series, with the reference branch being connected in parallel to at least two detection branches among the plurality of detection branches, so as to form a Wheatstone bridge with each one of the detection branches among the plurality of detection branches.

Multisensory detector

Membrane device comprising a support, a membrane suspended on the support, a first actuator in contact with the membrane designed to apply a force on the membrane, a second actuator in contact with the membrane designed to apply a force on the membrane, means of determining the position of the membrane relative to the support and control means of the first and second actuators, said control means applying a deformation signal to one of the first and second actuators to deform the membrane and applying a control signal to the other of the first and second actuators to control displacement of the membrane, application of the control signal being determined by the membrane position.

Device with a controlled displacement membrane

An in-plane MEMS or NEMS detection device for measuring displacements directed along a direction including a seismic mass suspended with respect to a substrate, the seismic mass being pivotable about an axis perpendicular to the plane of the substrate, at least one piezoresistive strain gauge mechanically connected to the seismic mass and the substrate, wherein the piezoresistive gauge has a thickness lower than that of the seismic mass, and wherein the axis of the piezoresistive strain gauge is orthogonal to the plane containing the pivot axis and the center of gravity of the seismic mass and the plane is orthogonal to the direction of the displacements to be measured.

In-plane piezoresistive detection sensor

A device with a mobile element extending along a given plane comprising at least one first, one second and one third layers extending in planes parallel to the given plane, with the first layer forming a support, the second layer comprising all or a portion of the mobile element and means for suspending the mobile element with respect to the support and the third layer comprising all or a portion of the capacitive means of which the capacitance varies according to the relative position of the mobile element with respect to the support, said capacitive means comprising at least one mobile electrode integral with one of the faces of the mobile element parallel to the given plane, and at least one fixed electrode with respect to the support, with the fixed and mobile electrodes being arranged at least partially in the same plane parallel to the given plane and at least partially above and/or below the mobile element.

Capacitive microelectronic and/or nanoelectronic device with increased compactness

MEMS and/or NEMS differential pressure measurement sensor comprising at least one first membrane and at least one second membrane, each suspended from a substrate, the first membrane having a face subjected to a reference pressure and a second face subjected to a first pressure to be detected, the second membrane having a first face subjected to the reference pressure and a second face subjected to a second pressure to be detected, a rigid beam of longitudinal axis articulated with respect to the substrate by a pivot link around an axis, said beam being solidly connected by a first zone to the first membrane and by a second zone to the second membrane such that the pivot link is situated between the first zone and the second zone of the beam, a sensor of measuring the movement of the beam around the axis, said sensor being arranged at least in part on the substrate.

Microelectromechanical and/or nanoelectromechanical differential pressure measurement sensor

Growing community of inventors

Grenoble, France

Philippe Robert