Commissariat &#xc0; L'&#xc9;nergie Atomique Et Aux &#xc9;nergies Alternatives

Safran

Safran Electronics & Defense

Philippe Onfroy

Alain Jeanroy

Audrey Berthelot

Guillaume Lehee

Vincent Ragot

Mikaël Colin

Jean-Sébastien Mace

Olivier Vancauwenberghe

Angular sensor with vibrating resonator includes a supporting structure, a first mass and a second mass which are concentric, and mechanical springs arranged symmetrically in pairs, the pairs themselves being arranged symmetrically with respect to one another. Each spring comprises a first elastic leaf and a second elastic leaf which are connected to one another by one end, the first elastic leaf of one of the springs of each pair being parallel to the second elastic leaf of the other of the springs of the same pair. The four elastic leaves of at least one pair comprise two adjacent pairs of leaves making an angle of approximately 45° between them. The sensor is not provided with electrostatic springs.

Sensor with mechanical compensation frequency anisotropy

A microdevice () comprising a movable element () capable of moving relative to a fixed part (), produced in first and second layers of material () arranged one above the other such that the movable element comprises a portion () of the first layer and a portion () of the second layer secured to each other, and wherein the movable element is suspended from the fixed part by a suspension structure () formed in the first and/or second layer of material.

Microdevice comprising at least two movable elements

The invention concerns a resonatorconfigured to be integrated into an inertial angular sensor, said resonatorcomprising at least one mass suspended by mechanical springs, a number N of pairs P(2&#x2264;i&#x2264;N) of electrostatic springs, said resonatordefining at least four axes of symmetry S, S, Sand S, characterized in that: each pair Pconsists of two electrostatic springseach having a privileged axis of action, these electrostatic springsbeing positioned so that their respective axes form a right angle; for at least one spring of one of the pairs and one spring of another pair, the angle formed by these two springs is equal to a predefined angle.

Resonator configured to be integrated into an inertial angular sensor

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Moissy-Cramayel, France

Philippe Onfroy