Safran Electronics & Defense

Philippe Onfroy

Alain Jeanroy

A MEMS type inertial sensor comprising a support structure having at least a first seismic body and a second seismic body connected thereto by resilient means in order to be movable in a suspension plane, transducers for maintaining the seismic bodies in vibration and for determining movements of the seismic bodies in the suspension plane, and a control unit connected to the transducers by electrical conductor means. The transducers comprise at least one electrode secured to the first seismic body and at least one electrode secured to the second seismic body, the two electrodes being arranged to enable relative movements of the seismic bodies relative to each other in the suspension plane to be measured directly.

Sensor including moving masses and means for detecting relative movements of the masses

The invention relates to a vibrating MEMS inertial angular sensor including a substrate for supporting at least two mass bodies mounted to bear mobile relative to the substrate and associated with at least one electrostatic actuator and at least one electrostatic detector. The sensor includes first means for suspending the mass bodies relative to the substrate and means for coupling the mass bodies together. The substrate is connected to a stationary rack by second suspension means.

MEMS balanced inertial angular sensor and method for balancing such a sensor

A method for controlling a piezoelectric device including a piezoelectric element attached to a substrate, with the substrate and the piezoelectric element being made of materials having different coefficients of thermal expansion includes the step of subjecting the piezoelectric element to a predetermined electric voltage in order to cause a predetermined set deformation of the piezoelectric element. The predetermined electric voltage comprises a compensation portion determined according to ambient temperature to cancel a stress generated on the piezoelectric element due to a differential thermal expansion between the piezoelectric element and the substrate.

Method for controlling a piezoelectric device having a piezoelectric element mounted on a substrate

An inertial sensor comprising a frame to which at least two seismic bodies are connected by resilient means so as to be movable in a suspension plane, and transducers to keep the seismic bodies vibrating and to determine a relative movement of the seismic bodies relative to one another, characterized in that the seismic bodies have a single shape and a single mass, and in that the seismic bodies comprise interlocking parts such that the seismic bodies are nested inside one another while being movable in the suspension plane relative to the other of the seismic bodies, with the seismic bodies having centers of gravity that coincide with one another. A method for manufacturing such a sensor.

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Boulogne Billancourt, France

Philippe Onfroy