Panasonic Corporation

Imec Vzw

Imec

Philippe Helin

Peter Peumans

Yasuyuki Naito

Liesbet Lagae

Pol Van Dorpe

Simone Severi

Hendrikus Tilmans

Bert Du Bois

Andim Stassen

The present disclosure relates to semiconductor devices for detecting fluorescent particles. At least one embodiment relates to an integrated semiconductor device for detecting fluorescent tags. The device includes a first layer, a second layer, a third layer, a fourth layer, and a fifth layer. The first layer includes a detector element. The second layer includes a rejection filter. The third layer is fabricated from dielectric material. The fourth layer is an optical waveguide configured and positioned such that a top surface of the fourth layer is illuminated with an evanescent tail of excitation light guided by the optical waveguide when the fluorescent tags are present. The fifth layer includes a microfluidic channel. The optical waveguide is configured and positioned such that the microfluidic channel is illuminated with the evanescent tail. The detector element is positioned such that light from activated fluorescent tags can be received.

Semiconductor device for detecting fluorescent particles

In a MEMS elementwhere a MEMS structureis hermetically sealed in a cavityby a substrateand laminated structure, interface sealing layersandare provided between two layers that constitute the laminated structure, so as to prevent gas from breaking into the cavitythrough the interface between two layers along the direction parallel to the surface of the substrate

MEMS element and electrical device using the same

Growing community of inventors

Leuven, Belgium

Philippe Helin