Commissariat &#xc0; L'&#xc9;nergie Atomique Et Aux &#xc9;nergies Alternatives

Commissariat a L'energie Atomique

California Institute of Technology

Other

Thales

Analytical Pixels Technology-apix Technology

Apix Analytics

Philippe Andreucci

Laurent Duraffourg

Eric Colinet

Sebastien Hentz

Thomas Ernst

Eric Ollier

Edward B Myers

Michael Roukes

Bernard Viala

Pierre Puget

Julien Arcamone

Joshua B Whiting

Lise Bilhaut

Mélanie Petitjean

Serge Gidon

Guillaume Jourdan

Sergio Nicoletti

Thierry Poiroux

Mickaël Brun

Sébastien Hentz

Mathieu Carras

Jean-Christophe Gabriel

Carine Marcoux

Sebastien Labarthe

Jeremie Ruellan

Pierre Brianceau

Charles-Marie Tassetti

Sébastien Labarthe

Xavier Marcadet

Mickael Lee Roukes

Régis Barattin

Peter Thomas Stevens

Stephane Minoret

Michael L Roukes

Joshua Whiting

Jérémie Ruellan

A device for analyzing a fluid, including a layer including a plurality of sensors of MEMS and/or NEMS type, a layer including a mechanism controlling the sensor and for processing information transmitted by the sensors, the control and processing mechanism being electrically connected to the detectors, and a layer positioned on the layer including the sensors on a side of a face including the sensors including a mechanism spatially and temporally distributing the fluid on the sensors.

Analysis device including a MEMS and/or NEMS network

A gas analysis system includes a fluidic channel for flow of a gas to be analyzed, a detector in the channel and adapted for measuring interactions of the gas with the detector, the detector including a resonator of the electromechanical nanosystem (NEMS) type and a heating system for heating a part of the detector, an actuation device for vibrationally actuating the resonator according to an excitation signal applied to an input of the detector, a detection device adapted for providing an output electric signal representative of the vibrations of the resonator, a read-out device connected to an input of the detector and configured for simultaneously measuring, from the output signal of the detector, the change in resonance frequency and the change in amplitude of the vibrations at the resonance frequency of the resonator, and a processing device configured for determining from the changes a fluidic characteristic of the gas.

System and method for analyzing a gas

The invention relates to a measurement system including a network of nanoelectromechanical system (NEMS) resonators, characterized in that: each one of said resonators includes: an electrostatic activation device capable of generating a vibration of a beam exposed to said excitation signal, at least one piezoresistive stress gauge made of a doped semiconducting material, extending from the beam so as to detect a movement of said beam, the variation in the electrical resistance of said at least one gauge supplying an output signal; said network includes at least two groups of resonators, each group including at least two resonators having an identical empty resonance frequency, each group of resonators having an empty resonance frequency different from that of each other group; the resonators forming each group are connected in parallel; the groups of resonators forming said network are connected in parallel; said system includes a reading device designed to supply an excitation signal at the network input and to determine the resonance frequency of a group of resonators which is selected by injecting, into said excitation signal, a frequency component corresponding to the empty resonance frequency of each selected group of resonators, and by identifying, in the output signal of the network, a resonance frequency component of the selected group of resonators.

Measurement system including a network of nanoelectromechanical system resonators

A thermal flow sensor comprising at least one first element () suspended with respect to a support, said first suspended element () being of an electrically conductive material, first means () for biasing said suspended element () and first means () for measuring the variation of the electric voltage at the terminals of the suspended element (), said first suspended element () being formed by a nanowire and said first biasing means () are formed by an alternating current source the intensity of which provides heating of the first suspended element () by Joule effect.

Thermal flow sensor, gas sensor comprising at least one such sensor and Pirani gauge comprising at least one such sensor

The invention relates to a gas analysis system comprising, from upstream to downstream:

Gas analysis system comprising a gas spectrometer equipped with a micro-reflectron

The invention relates to a thermal flow sensor comprising:

Thermal flow sensor with vibrating element and gas sensor comprising at least one such sensor

A measuring system including: at least two electromechanical resonators each having a resonant frequency varying around an offload resonant frequency according to a physical quantity to be measured; at least one reading device connected to inputs of the resonators and configured to supply an excitation signal on the inputs; and a memory in which is recorded, for each resonator, offload resonance information relating to the offload resonant frequency of the resonator. Each reading device is configured to determine the resonant frequency of one or more resonators selected for reading by configuring at least one element of the reading device using the offload resonance information stored for each selected resonator.

Measuring system having electromechanical resonators, method for manufacturing such a system, and method for reading at least two electromechanical resonators

A bolometer including: at least one electromechanical microsystem or nanosystem, the microsystem or nanosystem including a support and a mobile mass hung from beams above the support, the mobile mass forming an absorber of optical flux; actuation electrodes configured to set the mobile mass in vibration and arranged laterally relative to the mobile mass; and detection electrodes to detect variation in vibration frequency of the mobile mass arranged laterally relative to the mobile mass.

Bolometer having frequency detection

A device including: a nanowire that includes a first conductive region, and a second region, wherein the second region is an insulator material, the second region does not occupy an entire thickness of the nanowire, and the nanowire is configured so that a current is able to circulate in the nanowire from one end of the nanowire to another end of the nanowire.

Nanowire sensor device

A device with a suspended beam and piezoresistive means of detecting displacement of the beam and a method of manufacturing the device are disclosed. The device comprises a support, a suspended beam, moving parallel to the plane of the support, and means of detecting displacement, comprising at least two piezoresistive strain gauges that are not in line with each other. The beam is suspended through detection means. The two gauges are located on two opposite lateral faces of the beam respectively.

Device with suspended beam and piezoresistive means of detecting displacement of the beam and method of manufacturing the device

A nano electro-mechanical system (NEMS) formed on a substrate is provided including at least one fixed part associated with the substrate and at least one movable part in relation to the substrate, the system including a transduction component configured to excite the movable part to confer on it a movement and/or to detect a movement of the movable part, the transduction component including at least one electrically conductive material. The electrically conductive material is made of an AlSi alloy based deposition, the deposition being supported at least in part by the movable part of the system.

NEMS comprising AlSi alloy based transducer

Method of fabricating an electro-mechanical microsystem provided with at least one fixed part comprising a bar, and at least one mobile part in rotation around at least one portion of said bar, the method comprising the steps of:

Method of fabricating an electromechanical component using graphene

Bistable magnetic nanoswitch

A photoacoustic detection device including a nanophotonic circuit including a plurality of semiconductor lasers capable of emitting a different frequencies; input couplers connected to optical waveguides; a multiplexer; an output optical waveguide, emerging into a recess; a tuning fork having its free arms arranged at the output of the output optical waveguide; and means for detecting the vibration of the tuning fork, all these elements being assembled in a monolithic component.

Photoacoustic gas detector

A nano-resonator device comprising at least one fixed element and at least one mobile element with respect to the fixed element, first electromagnetic means, integrated or fixed on the fixed element, and second electromagnetic means, integrated or fixed on the mobile element, to generate an oscillating movement of the mobile element.

Magnetic nano-resonator

Growing community of inventors

Moirans, France

Philippe Andreucci