Csem Centre Suisse D'electronique Et De Microtechnique Sa

Philipp Niedermann

Sylvain Jeanneret

Cynthia Beuret

Rainer F Christoph

A process for fabricating a feeler member for a micromechanical probe, in particular for an atomic force microscope, consists in creating a 'positive' first mold by isotropically or anisotropically undercutting a silicon substrate. The resulting tip is precursor of the hard material (preferably diamond) tip to be obtained. The precursor has a small angle at the apex, for example in the order of 10.degree. to 20.degree., or less. The positive mold is then used to fabricate a 'negative' mold having an imprint whose shape is that of the tip precursor. The negative mold is filled with a layer of hard material and the tip is then uncovered. The hard material tip therefore also has a small angle at the apex, equal to that of the precursor. The resolution that can be achieved with the probe is therefore higher than that assured by prior art probes.

Process for fabricating a feeler member for a micromechanical probe, in

Process for manufacturing micromechanical components having a part made of diamond, consisting of at least one tip (3a), in which a substrate (8a) is prepared, in order to form an impression (13a) of the shape desired for the part made of diamond; the part made of diamond is produced by chemical vapor deposition of diamond in the impression and is then separated from the substrate. In order to produce the part made of diamond, a primary film of fine diamond particles, of diameter less than 10 nm, suitable to act as seeds for growth of the diamond are deposited on the substrate, on the surface of the impression (13a), before chemical vapor deposition; the diamond film is then grown by vapor deposition; and the substrate (8a) is then at least partly removed.

Process for manufacturing micromechanical components having a part made

A tunnel effect sensor, suitable for determining the topography of a surface, arm for exploring the profile of a surface of the sample by scanning it along two axes. The arm includes a tactile point that can be moved in a direction normal to the surface to be explored and a tunnel point near a tunnel electrode attached to the substrate. A control loop controls the distance between the tunnel point and its electrode. The position of the feeler arm is adjusted by means of the control loop and two actuators operating on the feeler arm in opposite directions. The feeler arm can therefore effect a virtual pivoting movement about the tunnel point. As a result, the sample-holder does not need to be moved along the measurement axis during measurements. Applications include atomic force microscopes.

Growing community of inventors

Neuchatel, Switzerland

Philipp Niedermann