Carl Zeiss Industrielle Messtechnik Gmbh

Philipp Mayinger

Walter Jenisch

Tobias Held

Kurt Brenner

Kai Schäffauer

Markus Mahringer

Stefan Hitzler

Michael Zimmermann

Dieter Kaufmann

Kai Bartel

Anton Fuchs

Christian Bayer

Otto Steinecker

A method and an apparatus for isolating a vibration of a positioning device are provided. The apparatus includes a base plate for the positioning device, at least one active bearing element for bearing the base plate on/at a foundation and at least one evaluation and control device. The apparatus includes at least one means for determining a foundation movement-dependent quantity, wherein the active bearing element is controllable by the at least one control and evaluation device on the basis of the foundation movement-dependent quantity.

Method and apparatus for isolating a vibration of a positioning device

A tactile and/or optical distance sensor includes a housing, which has at least one elongate portion, a measurement arm, which is arranged in the housing, at least partially extends through the elongate portion and has a tactile and/or an optical probe element at one end, a transducer, which is configured to capture a position of the tactile probe element or a signal of the optical probe element and to generate associated probe element measurement signals, and an advance unit, with which the housing is linearly dis-placeable along an advance direction. A strain sensor is located in the region of the measurement arm extending through the elongate portion or at an adjacent region directly adjoining said region. In addition, a system for measuring the roughness of a surface of a workpiece and a method for calibrating a distance sensor or a system are provided.

Tactile and/or optical distance sensor, system having such a distance sensor, and method for calibrating such a distance sensor or such a system

A calibration standard for geometry measurement calibration of a measurement system operating by tactile and/or optical means is provided which includes a flat surface having a structure that is capturable by a measurement system operating by optical and/or tactile means. The structure has a changeable periodicity that is capturable by a sensor in a first direction and/or in a second direction and for a change in the periodicity to code position information and/or direction information. In addition, a method for calibrating a coordinate measuring machine operating by tactile and/or optical means and to a coordinate measuring machine for such a method or having such a calibration standard is provided.

Calibration standard for geometry calibration of a measurement system operating by tactile and/or optical means, method for calibration, and coordinate measuring machine

A holder is configured to hold multiple reference standards for calibrating a measurement system. The holder includes a first receptacle that is configured to receive a first reference standard. The holder includes a second receptacle that is configured to receive a second reference standard. The holder includes a calibration jig that is configured to facilitate a bijective determination of a position and orientation of the holder in space.

Holder for multiple reference standards for calibrating a measurement system

A method for capturing dynamic vibrations of a roughness sensor of a roughness measuring apparatus is provided. The movement of the roughness sensor relative to the roughness measuring apparatus and/or relative to a surface of a workpiece is captured by a measuring system in the frequency range below 100 Hz with a data capturing rate of greater than 100 Hz. The captured data of the relative movement are made available for further data processing in and/or stored. Moreover, a method for measuring the roughness of a workpiece surface is provided, in which the method for capturing the dynamic vibrations of a roughness sensor is used. In addition, a computer program product for controlling a roughness sensor of a roughness measuring apparatus in accordance with one of the methods is provided, and a roughness measuring device that is configured to carry out one of the methods.

Method for capturing dynamic vibrations of a roughness sensor, method for measuring a roughness of a workpiece surface, computer program product and measuring device configured to carry out the methods

A holder for a plurality of reference standards for calibrating a measurement system, having a first receptacle in which a first reference standard is arranged and a second receptacle in which a second reference standard is arranged, wherein the first receptacle is arranged on a first side of the holder, and the second receptacle is arranged on a second side of the holder facing away from the first side of the holder.

Holder for a plurality of reference standards for calibrating a measurement system

An apparatus for measuring a surface of a workpiece has a multi-link articulated arm and a roughness sensor carried by the arm, which includes a sensing element linearly displaceable along an advance direction and elastically deflectable along a deflection direction, and which has a coupling link to connect it to a movable carrier of a coordinate measuring apparatus or of a robot. A first arm portion is rotatable relative to the coupling link about a first axis of rotation. A second arm portion is rotatable relative to the first arm portion about a second axis of rotation and arranged between the first and third arm portion which is rotatable relative to the second arm portion about a third axis of rotation, and to which the roughness sensor is fastened. The deflection direction is arranged parallel to the third axis while the sensing element is displaced linearly along the advance direction.

Apparatus for measuring the roughness of a workpiece surface

A positioning apparatus for positioning a tactile or optical roughness sensor, a probe or some other measuring instrument with respect to a workpiece can be secured to a movement device of a coordinate measuring machine. The positioning apparatus has a drive that produces a relative movement between two parts of the positioning apparatus, and an inhibiting device, which inhibits the relative movement between the two parts. For this purpose, the inhibiting device has a first friction element and a second friction element each having unlubricated friction surfaces. The friction surfaces are pressed against one another with a normal force that is not variable during the operation of the positioning apparatus. A coefficient of sliding friction that is less than 0.15 acts between the friction surfaces in the case of dryness and without lubrication. Typically, the inhibiting device is arranged in a flexspline of a strain wave gearing.

Apparatus movable by a coordinate measuring machine for positioning a measuring instrument with respect to a workpiece

A method for determining measurement conditions of a roughness sensor having at least one measuring needle, a computer program product and a measuring device for carrying out the method are provided. The measuring needle is positioned on a surface in a rest state and rests on the surface without being moved. Measurement signals are recorded in the rest state. A signal line of the roughness sensor is electrically grounded and measurement signals are recorded in the grounded rest state. Further, a method for measuring a roughness of a workpiece surface by the roughness sensor is provided in which the measuring needle is guided along a surface section of the workpiece surface to be measured and moved in a measurement direction (x-direction). The movement of the measuring needle in a plane (yz-plane) perpendicular to the measurement direction is recorded during the movement of the measuring needle along the workpiece surface.

Method for determining measurement conditions of a roughness sensor, method for measuring a roughness of a workpiece surface, computer program product, and measuring device designed to perform the methods

Growing community of inventors

Aalen, Germany

Philipp Mayinger