Carl Zeiss Smt Gmbh

Carl Zeiss Ag

Philipp Huebner

Stefan Richter

Gerhard Krampert

Timo Mappes

An electro-optical circuit board can provide probe card functionality. The electro-optical circuit board includes at least one electrical conductor track and at least one optical beam path.

Electro-optical circuit board for contacting photonic integrated circuits

Methods and apparatuses for testing a photonic integrated circuit and a corresponding sample holder and a photonic integrated circuit are provided. Here, a location for an illumination light beam can be selected by way of a scanning device, with the result that targeted coupling of the illumination light into the photonic integrated circuit is made possible.

Devices, methods and sample holder for testing photonic integrated circuits and photonic integrated circuits

An optical system for producing lithographic structures is disclosed. Also disclosed is a method for determining relative coordinates of a position of a writing field relative to a position of a preview field in such an optical system, and a method for producing lithographic structures using such an optical system.

Growing community of inventors

Hamburg, Germany

Philipp Huebner