Infineon Technologies Ag

Philipp Greiner

Norbert Druml

Ievgeniia Maksymova

Andreas Wiesbauer

Franz Michael Darrer

Boris Kirillov

Hendrikus Van Lierop

Niccoló De Milleri

Wilfried Florian

Maksym Sladkov

Christoph Steiner

Benjamin Kollmitzer

Marcus Edward Hennecke

Martin Wurzer

Stephan Gerhard Albert

Walter Schuchter

Hermann Hofer

Bert Zinserling

A microphone includes a microelectromechanical system (MEMS) device responsive to sound waves or vibrations having an output coupled to a first node; a programmable gain amplifier or source follower having an input coupled to a second node, and an output for generating an analog signal, wherein the MEMS device output and the programmable gain amplifier or source follower input comprise a first nonlinear equivalent capacitance having a first capacitance-to-voltage (CV) profile; and a nonlinear capacitance component coupled to the first node, the second node, and at least one reference voltage node, wherein the nonlinear capacitance component comprises a second nonlinear equivalent capacitance having a second CV profile.

Capacitive linearization method applied to MEMS microphones systems

An oscillator control system includes an oscillator structure configured to oscillate about first and second rotation axes according to a Lissajous pattern, wherein an oscillation about the second rotation axis imparts a cross-coupling error onto an oscillation about the first rotation axis, and wherein the cross-coupling error changes in accordance with a Lissajous position within the Lissajous pattern; and a driver circuit that includes a phase-locked loop (PLL) configured to regulate a driving signal that drives the oscillation about the first rotation axis. The PLL is configured to generate a PLL signal based on a phase error of the oscillation about the first rotation axis. The PLL includes a compensation circuit configured to receive the PLL signal and the Lissajous position within the Lissajous pattern, apply a compensation value to the PLL signal to generate a compensated PLL signal used for generating the driving signal based on the Lissajous position.

Detection, correction, and compensation of coupling effects of microelectromechanical system (MEMS) axes of a two-dimensional scanning structure

A scanning system includes a scanning structure configured to rotate about at least one first scanning axis; a driver configured to drive the scanning structure about the at least one first scanning axis and detect a position of the scanning structure with respect to the at least one first scanning axis during movement of the scanning structure; a segmented pixel sensor including a plurality of sub-pixel elements arranged in a pixel area; and a controller configured to selectively activate and deactivate the plurality of sub-pixel elements into at least one active cluster and at least one deactivated cluster to form at least one active pixel from the at least one active cluster, receive first position information from the driver indicating the detected position of the scanning structure, and dynamically change a clustering of activated sub-pixel elements and a clustering of deactivated sub-pixel elements based on the first position information.

Beam steering aware pixel clustering of segmented sensor area and implementing averaging algorithms for pixel processing

An oscillator driver system includes an oscillator structure and a driver circuit. The oscillator structure includes a rotor terminal configured to receive a rotor voltage and a stator terminal configured to receive a stator voltage, and is driven about a rotation axis according to a voltage difference between the rotor and stator voltages. The driver circuit is configured to generate a driving signal and output the driving signal as the rotor voltage, wherein the driving signal toggles between low and high voltage levels at an actuation frequency to drive the oscillator structure about the rotation axis, and wherein the stator voltage is a fixed voltage. The low and high voltage levels are greater than the stator voltage such that the voltage difference toggles between a low voltage difference and a high voltage difference as the driving signal toggles between the low voltage level and the high voltage level, respectively.

Power optimized driving signal switching scheme for oscillating MEMS mirrors

An oscillator system includes an oscillator structure configured to oscillate about a first axis according to a first oscillation and oscillate about a second axis according to a second oscillation; a first driver configured to drive the first oscillation, detect first zero-crossing events of the first mirror, and generate a first position signal based on the detected first zero-crossing events; a second driver configured to drive the second oscillation, detect second zero-crossing events of the second mirror, and generate a second position signal based on the detected second zero-crossing events; and a synchronization controller configured to receive the first and the second position signals, and synchronize at least one of a phase or a frequency of the second oscillation with at least one of a phase or a frequency of the first oscillation, respectively, based on the first and the second position signals.

Synchronization of microelectromechanical system (MEMS) mirrors

An oscillator control system that includes an oscillator structure; a phase error detector configured to generate a phase error signal based on a delayed event time signal and delayed reference signal; an analog signal path coupled between the oscillator structure and the phase error detector, the analog signal path configured to receive an event time signal and produce the delayed event time signal; a control circuit configured to generate a reference signal; a programmable delay circuit configured to receive the reference signal and induce a programmable delay on the reference signal thereby generating the delayed reference signal; and an analog delay measurement circuit configured to inject a test signal into the analog signal path, receive a delayed test signal from the analog signal path, measure an analog delay of the delayed test signal, and generate a configuration signal configured to adjust the programmable delay according to the measured analog delay.

Delay measurement, monitoring, and compensation of an oscillator control system

A circuit includes a first biasing voltage source, a second biasing voltage source, a first resistor device coupled between the first biasing voltage source and a first terminal of the circuit, a second resistor device coupled between the second biasing voltage source and a second terminal of the circuit, a third resistor device coupled between the second biasing voltage source and a third terminal, a first capacitor coupled between the third terminal and ground, and an amplifier having an input coupled to the second terminal and an output coupled to a circuit output.

Single-ended readout of a differential MEMS device

A multi-mirror system includes a first mirror configured to oscillate about a first axis; a second mirror configured to oscillate about a second axis; a first driver configured to drive an oscillation of the first mirror, detect first zero-crossing events of the first mirror, and generate a first position signal based on the detected first zero-crossing events; a second driver configured to drive an oscillation of the second mirror, detect second zero-crossing events of the second mirror, and generate a second position signal based on the detected second zero-crossing events; and a synchronization controller configured to receive the first and the second position signals, and synchronize at least one of a phase or a frequency of the oscillation of the second mirror with at least one of a phase or a frequency of the oscillation of the first mirror, respectively, based on the first and the second position signals.

Systems and methods are provided for compensating errors. A system includes a microelectromechanical systems (MEMS) oscillating structure configured to oscillate about a rotation axis; a phase error detector configured to generate a phase error signal based on measured event times and expected event times of the MEMS oscillating structure oscillating about the rotation axis; and a compensation circuit configured to receive the phase error signal, remove periodic jitter components in the phase error signal to generate a compensated phase error signal, and output the compensated phase error signal.

Detection and compensation of MEMS oscillating structure asymmetries and periodic jitters

Disclosed is an apparatus which has, among other things, a MEMS device with a first measurement arrangement for capturing a measurement variable (X) based on a physical variable, which has a useful variable component (N) and a first disturbance variable component (Z), and a second measurement arrangement for capturing a second disturbance variable component (Z). The apparatus furthermore has a disturbance compensation circuit which is configured to combine the second disturbance variable component (Z) and the measurement variable (X) with one another and to obtain a disturbance-compensated measurement variable (X). The MEMS device is arranged in a housing, wherein the MEMS device is in immediate mechanical contact with the housing by way of at least 50% of a MEMS device surface.

Packaged MEMS device with disturbance compensation

A system may include a micro-electro-mechanical systems (MEMS) mirror and a MEMS driver circuit. The MEMS driver circuit may obtain a plurality of items of monitoring information associated with the MEMS mirror. The plurality of items of monitoring information may include at least one of sensor information received from one or more sensors associated with the MEMS mirror, or operation information received from a controller associated with the system. The MEMS driver circuit may determine a state of the MEMS mirror based on the plurality of items of monitoring information. The MEMS driver circuit may adapt a mirror control parameter, associated with controlling the MEMS mirror, based on the state of the MEMS mirror.

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Graz, Austria

Philipp Greiner