Average Co-Inventor Count = 3.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Carl Zeiss Smt Gmbh (1 from 1,413 patents)
1 patent:
1. 12298675 - Projection exposure apparatus for semiconductor lithography with a vibration damper and method for designing a vibration damper