Mks Instruments, Inc.

Other

Philip W Sullivan

Paul D Lucas

Stephen F Bart

Lei Gu

Sergei Syssoev

Swaminathan Venkatesan

Ethan E Mattor

David Alcaide

A capacitive manometer offering improved measurement accuracy is disclosed which includes at least one electrode structure having an inner electrode structure and an outer electrode structure separated by at least one gap, at least one flexible diaphragm having at least one conductive material positioned thereon or integrated therein may be positioned in movable relation to the electrode structure and in proximity to the electrode structure, and at least one non-planar baffle less prone to transient measurement errors having an inner baffle structure and an outer baffle structure separated by at least one baffle orifice positioned distantly from the electrode structure proximate to the flexible diaphragm.

Capacitance manometer with improved baffle for improved detection accuracy

A pressure sensor may measure gas or liquid pressure. A chamber may have an inlet that receives the gas or liquid. A flexible diaphragm may be within the chamber that has a surface exposed to the gas or liquid after it flows through the inlet. A pressure sensor system may sense changes in the flexible diaphragm caused by changes in the pressure of the gas or liquid. A pressure-insensitive sensor system may sense changes in the flexible diaphragm that are not caused by changes in the pressure of the gas or liquid. The pressure-insensitive sensor system may be insensitive to changes in the flexible diaphragm caused by changes in the pressure of the gas or liquid.

Pressure sensor with real time health monitoring and compensation

Systems, methods, and apparatus, including software implementation, are disclosed providing drift prediction of output values for manometers. A signal or other indication may be provided for or in relation to a capacitance manometer when a servicing, replacing, and/or zeroing event is predicted or determined to be required, based on a history (e.g., timestamps) associated with previous zeroing events. Previously recorded timestamps can be curve fit with suitable functions to calculate or predict future maintenance, calibration, and/or replacement events for a manometer. Such signals or indications can be generated as an on-screen indication, and could also be available upon interrogation of the manometer via a digital communications link or system.

Capacitance manometers and methods relating to auto-drift correction

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Lexington, MA, United States of America

Philip W Sullivan