E.i. Dupont De Nemours and Company

Philip Shek Pang

Daniel B Laubacher

Processes for patterning amorphous fluoropolymer Teflon.RTM.AF, passivating high temperature superconductor films, and improved electronic devices with amorphous fluoropolymer Teflon.RTM.AF films are disclosed.

Fluoropolymer protectant layer for high temperature superconductor film

A method for decreasing the microwave surface impedance of high-temperature superconducting thin films comprises (a) applying, preferably by spin-coating, a protective coating (preferably poly(methyl methacrylate) or polyimide) to the surface of a high-temperature superconducting thin film, such as Tl.sub.2 Ba.sub.2 CaCu.sub.2 O.sub.8 ; (b) exposing the coated thin film to low angle ion milling at an incident angle of 5.degree. to 30.degree. (preferably 10.degree. to 20.degree.) relative to the surface of the coated film; and (c) optionally including the step of removing any residual protective coating from the surface of the thin film, such as by exposure to an oxygen plasma.

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Philip Shek Pang