Robert Boschgmbh

Philip Kaupmann

Joerg Muchow

Helmut Grutzeck

Stefan Pinter

Jochen Franz

Timo Schary

A micromechanical micromirror array including a frame including a cutout, a micromirror device suspended on the frame in the area of the cutout in a first plane, a first pivoting vane device suspended on the frame protruding into the area of the cutout, coupled to the micromirror device via a first spring device, a second pivoting vane device suspended on the frame protruding into the area of the cutout, coupled to the micromirror device via a second spring device, a first drive device for deflecting the first pivoting vane device along a first axis, perpendicular to the first plane, and a second drive device for the antiphase deflection of the second pivoting vane device along the first axis.

Micromechanical micromirror array and corresponding operating method

A micromechanical component having a mount, an adjustable element, which is connected via at least one spring to the mount, and an actuator device, a first oscillatory motion of the adjustable element about a first axis of rotation and simultaneously a second oscillatory motion of the adjustable element, which is set into the first oscillatory motion, being excitable about a second axis of rotation in response to the actuator device; and the adjustable element being configured by the at least one spring to be adjustable on the mount in such a way that the adjustable element is adjustable by a resulting angular momentum about a rotational axis, which is oriented orthogonally to the first axis of rotation and orthogonally to second axis of rotation. Also, a method for manufacturing a micromechanical component. Moreover, a method for exciting a motion of an adjustable element about a rotational axis.

Micromechanical component having an oscillator, a method for the manufacture thereof, and a method for exciting a motion of an adjustable element about a rotational axis

A micromechanical component, including an adjustable part that is connected, at least via springs, to the mounting, and an actuator device with which a first oscillating motion of the adjustable part is excitable about a first rotational axis and at the same time a second oscillating motion of the adjustable part is excitable about a second rotational axis. The actuator device includes four piezoelectric bending actuators, and the adjustable part is settable into the first oscillating motion and/or into the second oscillating motion by deformation of the four piezoelectric bending actuators, and each of the four piezoelectric bending actuators at its first end is anchored to the mounting, and the adjustable part is suspended, at least via the springs, on the four piezoelectric bending actuators.

Micromechanical component, method for manufacturing a micromechanical component, and method for exciting a movement of an adjustable part about a rotational axis

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Gundelfingen, Germany

Philip Kaupmann