Lanxide Technology Company, LP

M Cubed Technologies, Inc.

Philip Joseph Roach

Terry D Claar

Vilupanur Alwar Ravi

Clarence A Andersson

Michael A Richmond

Barry Robert Rossing

A composite adhesive featuring a matrix phase that includes a cyanate ester and a filler or reinforcement phase that includes a plurality of bodies of at least one material comprising a high shear strength and/or high modulus material. Preferably, the filler also possesses at least one of high thermal conductivity and low coefficient of thermal expansion. Unlike certain commercially available cyanate esters, those of the instant invention substantially maintain or even increase in strength upon addition of the filler to the system. The instant composite adhesives may also display reduced coefficients of moisture expansion relative to the unfilled or 'neat' resin. Such a composite adhesive is extremely useful for joining articles where high strength and minimal swelling in moist environments are required, such as in the precision equipment industry. In particular, the instant adhesives find great utility in joining components for semiconductor fabrication equipment, such as those that support the optics in a lithography machine.

Composite Adhesive

This invention relates generally to a novel directed metal oxidation process which is utilized to produce self-supporting bodies. In some of the more specific aspects of the invention, a parent metal (e.g., a parent metal vapor) is induced to react with at least one solid oxidant-containing material to result in the directed growth of a reaction product which is formed from a reaction between the parent metal and the solid oxidant-containing material. The inventive process can be utilized to form bodies having substantially homogeneous compositions, graded compositions, and macrocomposite bodies. In a preferred embodiment, a substance comprising a filler material and a solid oxidant, preferably an admixture of particulates, is coated onto at least a portion of the solid oxidant-containing material. Such a technique is particularly advantageous for forming relatively thick reaction product layers which might not otherwise develop to the desired thickness using the original 'directed growth' embodiment. In a particularly preferred embodiment, the solid oxidant and the solid oxidant-containing material have the same chemical composition, and the filler material and the reaction product have the same chemical composition.

Method for making self-supporting composite bodies

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Townsend, DE, United States of America

Philip Joseph Roach