Taiwan Semiconductor Manufacturing Comp. Ltd.

Philip Jan Lin

Jeng-Ding Tseng

Tien Chen Hu

Tain Chen Hu

Chang-Yueh Wu

Tain-Jenn Hu

The present invention discloses a gas generating device that is equipped with a gas leakage detection and control system which includes a multiple number of gas generating units each equipped with flow sensors for detecting flow rates in and out of the unit and a unit controller. The gas generating device is controlled by a main controller so that when leakage in a generating unit is detected, the unit is shut off and bypassed while the outputs of the other generating units can be increased to make up the shortage such that such that the total output from the gas generating device is not affected. The present invention novel apparatus further provides the capability that any leakage in the piping system which connects the multiple number of generating units can be detected by using flow sensors installed in a main gas inlet and a main gas outlet such that the total gas flow rates coming in and going out can be continuously monitored.

Apparatus for detecting leakage in a gas reactor

A modified air activated pressure valve is described, together with a method for its manufacture, that has a pressure sensitive switch located in the inlet chamber and in the outlet chamber. These pressure sensitive switches are preset by the user to output a finite voltage (typically about 5 volts) only when they are exposed to a pressure that exceeeds some value. The outputs of both switches may then be displayed, as needed. Additionally, a display circuit is provided that gives an output signal only when both the inlet and the outlet chambers are at or above their intended pressures.

Check device for air activated pressure valve

A chemical reactant bottle for containing a chemical reactant is adapted for heat transfer with an ambient fluid. The bottle has a body including a top and a bottom and sidewalls between the top and the bottom of the bottle. The top and the bottom and the sidewalls define a cavity within the bottle. There is an opening through the top into the cavity at one end of the bottle. The bottle includes a plurality of external slots extending through the body parallel with the longitudinal axis. The slots extend between the sidewalls of the bottle to create additional contact surface with the ambient fluid.

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Taipei, Taiwan

Philip Jan Lin