Diamond Semiconductor Group, LLC

Philip Harvey

Edward W Bell

Nicholas R White

An apparatus is provided for one-dimensional magnetic scanning or switching of a charged particle beam. The apparatus can be extended to two dimensions at the cost of added complexity.

Apparatus for magnetically scanning and/or switching a charged-particle beam

A fast dosimeter for ion implantation and other systems that produce charges or current to be measured. When a charge accumulator reaches a predetermined charge, a fixed charge is removed to reduce the accumulated charge. A counter records each charge removal. Between removals, an analog-to-digital converter measures the accumulator charge. The outputs from the counter and the analog-to-digital converter provide a continually updated value for the total accumulated charge, and by differentiation, current with respect to time.

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Hampton Falls, NH, United States of America

Philip Harvey