Imec Vzw

Universiteit Gent

Philip Ekkels

Tom Sterken

A method for bonding thin chips to a target substrate is described herein. According to an example method, an adhesive tape is provided with thinned chips attached thereto. The chips are transferred to a carrier substrate by one or more tape-to-tape transfer steps. The carrier is then diced into separate carrier-and-chip assemblies, which can be handled by existing tools designed for handling chips of regular thickness. The fact that the thinning step is separate from the carrier attachment may lead to reduced thickness variation of the chips. The use of tape-to-tape transfer steps allows for attaching either the front or the back side of the chips to the carrier. The use of an individual carrier per chip allows for treating the thinned chip as if it were a standard chip.

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St. Laureins, Belgium

Philip Ekkels