International Business Machines Corporation

Philip C Hobbs

John Samuel Batchelder

Theodore Gerard Van Kessel

Donald M DeCain

Marc A Taubenblatt

Kenneth D Murray

Vaughn P Gross

Supratik Guha

Yves Corfield Martin

Hemantha Kumar Wickramasinghe

Robert L Sandstrom

Keith Randal Pope

Robert A Gruver

Steven J Holmes

Peter Alfred Gruber

Scott David Halle

Robert J Miller

Joachim Gerhard Clabes

Martin Patrick O'Boyle

Punit P Chiniwalla

Robert R Jackson

Henri A Khoury

Douglas W Cooper

Tadashi Mitsui

Jerry C Shaw

Laszlo Landstein

Theordore G Van Kessel

Calvin K Chi

Sandra K Wolterman

John L Sturtevant

Miro Plechaty

A method for fine positioning a component through the use of fusible elements having two or more melting points so as to establish intermediate displacements between totally melted fusible elements and unmelted fusible elements. Because of the use of non-eutectic fusible materials, fine adjustments in the displacement may be achieved.

Method and apparatus providing fine alignment of a structure relative to a support

A method of concentrating solar energy includes receiving solar energy through a surface of an optically clear shell, guiding the solar energy through a liquid contained in the optically clear shell, folding the solar energy back through the liquid toward a solar receiver, and shifting the solar receiver within the optically clear shell to track the sun, wherein the solar energy collected by the solar receiver is converted into electrical energy.

Method of concetrating solar energy

A solar concentration system includes an optically clear shell member having an outer surface and an inner surface, with the inner surface defining a hollow interior portion, a liquid contained within the hollow interior portion of the optically clear shell, and a solar collection system contained within the hollow interior portion of the optically clear shell. The solar collection system includes a tracking system configured and disposed to selectively shift within the hollow interior portion, a reflector member mounted to the tracking system, and a solar receiver mounted to the tracking system. The tracking system being configured and disposed orient the reflector member and the solar receiver to follow a path of the sun enhancing the collection of solar energy.

Solar concentration system

An apparatus for optical communication is provided. The apparatus includes a first waveguide formed on a first surface and a second waveguide formed on a second surface. The first and second surfaces are bonded together to form an air gap between the first and second surfaces and diffraction gratings of the first and second waveguides are facing each other. A third waveguide is formed on a third surface, and the third surface is bonded to the second surface so an air gap exists between the third and second surface and diffraction gratings of the third and second wave guides face each other. The light beam passes from the second wave guide across the air gap and into the third waveguide.

Chip to Chip optical interconnect

An assembly comprising a 3-D scanner and suitable for capturing at least one of objects, or textures, or documents. The assembly preferably can be developed as a pocket page scanner having dimensions approximately the size of a chalkboard eraser. The assembly preferably utilizes an alignment-insensitive diode laser interferometer. In operation, the assembly enables a user to scan any page-sized area in e.g., a half of second, store a hundred or so of them, then play them back into a PC infrared port for OCR, printing, archival storage, or further processing.

Assembly comprising a pocket 3-D scanner

An optical assembly utilizing a novel optical element. The assembly includes a tunable source of input radiation; an optical element that can receive at least a portion of the input radiation and comprises a manifold having at least two independent surfaces, in which at least a portion of each independent surface is selected from the group consisting of a reflective structure and a diffractive structure, and the independent surfaces are geometrically configured so that a portion of incident radiation to the manifold is diffracted at least twice in an angular sense that can increase a tuning sensitivity of an angular deviation of the incident radiation exiting the manifold; and, a scanner means which can accept and redirect a portion of the radiation output by the optical element for producing an illumination pattern.

Enhanced raster scanning assembly

Method and apparatus for realizing unusually sensitive and stable interferometric measurement capabilities. The apparatus comprises an optical interferometer with at least two optical outputs, the ratio of whose intensities can vary with a tuning parameter; and at least one detector, each of which is optically connected to the interferometer, and producing in aggregate at least two linearly-independent signals that depend on the light intensity and the tuning parameter, which are combined to produce a first measurement whose sensitivity to light intensity changes is substantially smaller than that of either of the two linearly-independent signals, and a second measurement whose sensitivity to the tuning parameter is substantially smaller than that of either of the two linearly-independent signals.

Optical interferometer measurement apparatus and method

Method for correcting aberrations of an optical system and solving the problem of tolerance buildup. The method posits a desired specification limit for each of at least one optical characteristic of an optical element, and requires embossing at least a portion of a surface of the optical element for bringing the or each optical characteristic within its corresponding specification limit.

Method for addressing wavefront aberrations in an optical system

Apparatus suitable for transforming a radiation beam so that it can exit with a predetermined alteration. The apparatus includes a first variably diffractive radiation element for transforming a characteristic of the radiation beam from an original state; a second radiation element juxtaposed to the first radiation element for transforming the same characteristic in a complementary way; and, means for physically deforming the first variably diffractive radiation element so that its diffracting pattern can change in a known way.

Apparatus utilizing a variably diffractive radiation element

An assembly for measuring a trench depth parameter of a workpiece is disclosed. The assembly has an ultra-violet radiation source; a split fiber bundle having a first branch for propagating the ultra-violet radiation from the radiation source to a lens, and a second branch; a lens for focusing the UV radiation to the workpiece and refocusing an ultra-violet interference signal to the second branch; and a detector responsive to the ultra-violet interference signal received through the second branch. The detector transforms the ultra-violet interference signal to an electrical signal which is a measure of a trench depth of the workpiece. The ultra-violet interference signal is developed when ultra-violet radiation propagates through the workpiece and reflects from its base region to thereby interfere with ultra-violet radiation that is directly reflected by a workpiece surface which is different from the base region.

Assembly for measuring a trench depth parameter of a workpiece

The present invention is directed to an analytic method for detecting trace elements in fluid solution. A cation exchange resin is packed with a radiolabelled exchange material having certain characteristics and replaces the trace element ions in the fluid which becomes labelled. The label is subsequently detected using sensitive and well known radiation detection methods.

Radionuclide exchange detection of ultra trace ionic impurities in water

An inexpensive eye tracking system requires no head gear. The eye tracking system uses the interference fringes between the corneal glint and the 'red eye' retinal reflection to obtain an angularly resolved, background-immune eye point signal for use as a pointing device for personal computers. Tunable (eye safe) diode laser spectroscopy is used to measure the period and amplitude of the Fabry-Perot fringes caused by the interference between the corneal glint and the 'red' reflection form the retina.

Inexpensive interferometric eye tracking system

In a photolithographic process utilizing a wafer coated with a chemically amplified photoresist, a method for controlling a line dimension. The method comprises the steps of measuring at at least two times, and from at least two angles, evolving signals comprising intensities of light diffracted from a portion of an exposed patterned area on the waver, the evolving signals corresponding to vector combinations of time dependent light diffracted from the pattern appearing in the photoresist; and substantially time invariant light diffracted due to any underlying pattern beneath the photoresist; and, combining the measurements mathematically for extracting a contribution due to the pattern evolving in the photoresist.

Method for controlling a line dimension arising in photolithographic

Ionization of air without the use of corona discharge tips, thereby to avoid the generation of particulates from corrosion of the corona tips, is accomplished by use of a laser beam focussed to a small focal volume of intense electric field adjacent a semiconductor chip. The electric field is sufficiently intense to ionize air. In the manufacture of a semiconductor circuit chip, during those steps which are conducted in an air environment, opportunity exists to remove from a surface of a chip, or wafer, charge acquired during the manufacturing process. The ionized air is passed along the chip surface. Ions in the air discharge local regions of the chip surface which have become charged by steps of a manufacturing process. By way of further embodiment of the invention, the ionization may be produced by injection of molecules of water into the air, which molecules are subsequently ionized by a laser beam and directed toward the chip via a light shield with the aid of a magnetic field.

Generation of ionized air for semiconductor chips

A heterodyne interferometer is combined with darkfield surface particle detection for improved surface particle detection sensitivity. The probe beam and the reference beam have different wavelengths. The reference beam may either be a real reference beam or a virtual reference beam. The probe beam may be incident at the surface at either a grazing angle or at an angle substantially normal to the surface. The real reference beam is incident at the surface at a grazing angle. The detection may either be conventional heterodyne detection or a combination of heterodyne and Lloyd's mirror detection.

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Briarcliff Manor, NY, United States of America

Philip C Hobbs