Air Products and Chemicals, Inc.

Philip Bruce Henderson

Daniel Joseph Tempel

Jeffrey Richard Brzozowski

Diwakar Garg

Ronald Martin Pearlstein

James Joseph Hart

Donald Elson Fowler

Eugene Joseph Karwacki, Jr

Wayne Thomas McDermott

Howard P Withers, Jr

Robert George Syvret

Beth Ann Campion

Timothy Christopher Golden

Charles G Coe

Madhukar Bhaskara Rao

Thomas R Gaffney

Andrew David Johnson

Pushpinder S Puri

John Peter Hobbs

Thomas N Jackson

Dingjun Wu

Frederick Carl Wilhelm

Richard Paul Underwood

Bernard A Toseland

David Ross Graham

Bing Ji

Christopher Robert Cording

John B Appleby

Hoshang Subawalla

Forrest Eli Hulbert

Montford S Benson

Jie Sun

Rosaleen Patricia Morris-Oskanian

Mario Joseph Moniz

Richard R Bodette

Herbert David Johnson

Frederick Carl Wilheim

Patrick Michael Colleran

Daniel Josef Tempel

A pressure-swing adsorption process for producing a purified nitrogen trifluoride (NF) product gas from a feed gas contaminated with carbon tetrafluoride (CF) using a column packed with an adsorbent that exhibits selectivity for NFover CF. The process separates the feed gas into a first product gas having a greater concentration of CFthan the feed gas and a second product gas having a lesser concentration of CFwithout the use of an inert carrier gas while recovering essentially all of the NF. The process includes filling the column with the feed gas until the column reaches a first pressure, removing the first product gas, and then removing the second product gas, where after the second product gas is removed the column is at a second pressure. A rinse gas of NFand CFmay be used to remove the first product gas or the second product gas.

Purification of nitrogen trifluoride by pressure swing absorption

During the conventional temperature swing adsorption (TSA) process, NFco-adsorbed with the impurities is vented during regeneration. This invention is a novel TSA cycle in which the co-adsorbed NFis recovered. In this novel TSA cycle, a control scheme is used to stop the adsorption prior to the saturation of the adsorber with impurities and use a recovery purge gas (either co-current or counter-current) to release the co-adsorbed NFoff the saturated adsorber. The effluent of the inert purge gas can be combined with the effluent of the on-stream vessel or can be recycled to the feed of the on-stream vessel. 10%-100% of the co-adsorbed NFis recovered and made available as product in this novel TSA cycle. Thus the overall process yield of NFis increased. The removing of the co-adsorbed NFfrom the adsorber also prevents adsorber degradation thus prolonging the useful life of the adsorber.

Recovery of NF3 from adsorption operation

A mixture and method for the storage and delivery of a gas are disclosed herein. In one aspect, there is provided a mixture comprising: an ionic liquid comprising an anion and a cation, at least a portion of the gas that is disposed within and reversibly chemically reacted with the ionic liquid, and optionally an unreacted gas. In another aspect, there is provided a method for delivering a gas from a mixture comprising an ionic liquid and one or more gases comprising: reacting at least a portion of the gas with the ionic liquid to provide the mixture comprising a chemically reacted gas and an ionic liquid and separating the chemically reacted gas from the mixture wherein the chemically reacted gas after the separating step has substantially the same chemical identity as the chemically reacted gas prior to the reacting step.

Ionic liquid based mixtures for gas storage and delivery

The present invention discloses plasma enhanced chemical vapor deposition (PECVD) process for depositing n-type and p-type zinc oxide-based transparent conducting oxides (TCOs) at low temperatures with excellent optical and electrical properties on glass and temperature sensitive materials such as plastics and polymers. Specifically, it discloses PECVD process for depositing n-type ZnO by doping it with B or F and p-type ZnO by doping it with nitrogen excellent optical and electrical properties on glass and temperature sensitive materials such as plastics and polymers for TCO application. The process utilizes a mixture of volatile zinc compound, argon and/or helium as a diluent gas, carbon dioxide as an oxidant, and a dopant or reactant to deposit the desired ZnO-based TCOs.

Method for depositing zinc oxide at low temperatures and products formed thereby

The invention relates to an improvement in apparatus and process for the formation of a complex of Lewis acidic or Lewis basic gases in a reactive liquid of opposite character and for the breaking (fragmentation) of said complex associated with the recovery of the Lewis gas therefrom. The improvement resides in forming finely divided droplets of reactive liquid and controlling the temperature, pressure and concentration of said Lewis gas of opposite character to provide for (a) the formation of said complex between said gas and reactive liquid or (b) the breaking of said complex and the recovery of the atomized droplets of reactive liquid.

Contact methods for formation of Lewis gas/liquid systems and recovery of Lewis gas therefrom

The invention relates to an improvement in apparatus and process for effecting storage and delivery of a gas. The storage and delivery apparatus is comprised of a storage and dispensing vessel containing a medium capable of storing a gas and permitting delivery of the gas stored in the medium from the vessel, the improvement comprising:

Wick systems for complexed gas technology

A mixture and method for the storage and delivery of at least one gas are disclosed herein. In one aspect, there is provided a mixture for the storage and delivery of at least one gas comprising: an ionic liquid comprising an anion and a cation; and at least one gas that is disposed within and is reversibly chemically reacted with the ionic liquid. In another aspect, there is provided a method for delivering at least one gas from a mixture comprising an ionic liquid and at least one gas comprising: reacting the at least one gas and the ionic liquid to provide the mixture and separating the at least one gas from the mixture wherein the at least one gas after the separating step is substantially the same as the at least one gas prior to the reacting step.

The present invention is directed to improvements in storage and delivery systems that allow for rapid fill and delivery of gases reversibly stored in a nonvolatile liquid medium, improvements in delivery and purity of the delivered gas. The low pressure storage and delivery system for gas which comprises: a container having an interior portion containing a reactive Lewis basic or Lewis acidic reactive liquid medium that is reversibly reacted with a gas having opposing Lewis acidity or basicity;

Storage and delivery systems for gases held in liquid medium

A method of producing an electrochromic device, includes the steps of: providing a first electron conducting layer on a substrate, providing a working electrode in communication with the first electron conducting layer, providing an ion conducting layer in communication with the working electrode, providing an ion storage electrode in communication with the ion conducting layer, and providing a second electron conducting layer in communication with the ion storage electrode, wherein at least one and less than all of the providing steps include(s) plasma chemical vapor deposition. An electrochromic device produced by the method of the invention is disclosed, as is an apparatus adapted to perform the method of the invention, including plasma CVD devices and vacuum sputtering devices.

Hybrid process for depositing electrochromic coating

This invention relates to an improvement in a low-pressure storage and delivery system for gases having Lewis basicity, particularly hazardous specialty gases such as phosphine and arsine, which are utilized in the electronics industry. The improvement resides in storing the gases in a liquid incorporating a reactive compound having Lewis acidity capable of effecting a reversible reaction between a gas having Lewis basicity. The reactive compound comprises a reactive species that is dissolved, suspended, dispersed, or otherwise mixed with a nonvolatile liquid.

Liquid media containing Lewis acidic reactive compounds for storage and delivery of Lewis basic gases

This invention relates to an improvement in a low-pressure storage and delivery system for gases having Lewis acidity, particularly hazardous specialty gases such as BFand diborane, which are utilized in the electronics industry. The improvement resides in storing the gases in a liquid incorporating a reactive compound having Lewis basicity capable of effecting a reversible reaction between a gas having Lewis acidity. The reactive compound comprises a reactive species that is dissolved, suspended, dispersed, or otherwise mixed with a nonvolatile liquid.

Liquid media containing Lewis basic reactive compounds for storage and delivery of Lewis acidic gases

A process for the selective removal of a TiO-containing substance from an article for cleaning applications is disclosed herein. In one embodiment, there is provided a process for removing a TiO-containing substance from an article comprising: providing the article having the TiO-containing substance deposited thereupon; reacting the substance with a reactive gas comprising at least one selected from a fluorine-containing cleaning agent, a chlorine-containing cleaning agent and mixtures thereof to form a volatile product; and removing the volatile product from the article to thereby remove the substance from the article.

Method for removing titanium dioxide deposits from a reactor

This invention relates generally to an improvement in low pressure storage and dispensing systems for the selective storing of gases having Lewis acidity or basicity, and the subsequent dispensing of said gases at pressures, e.g., generally below 5 psig and typically below atmospheric pressure, by modest heating, pressure reduction or both. The improvement resides in storing the gases in a reversibly reacted state within a reactive liquid having opposing Lewis basicity or acidity.

Reactive liquid based gas storage and delivery systems

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Allentown, PA, United States of America

Philip Bruce Henderson