Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.v.

Philip Beran

Gerhard Tischlinger

Markus Stahl-Offergeld

Markus Sand

Volker Peters

Daniel Cichon

The invention relates to an apparatus as well as a method for calibrating a magnetic sensor system including at least one magnetic field source and one magnetic field sensor arrangement with several individual magnetic field sensors. Here, a plurality of individual measurements is performed, wherein each individual measurement provides a number of measurement values depending on the number of the individual magnetic field sensors. The magnetic field of the magnetic field source is varied at the location of the magnetic field sensor arrangement between two successive individual measurements. Based on the measurement values and by applying an optimization or estimation method, one or several magnetic field sensor-specific parameters and/or magnetic field source-specific parameters are determined, which are used as correction values for calibrating the magnetic sensor system. According to the invention, a magnetic field source is used that generates an inhomogeneous magnetic field.

Apparatus and method for calibrating a magnetic sensor system using an inhomogeneous magnetic field source

The present invention relates to a Hall effect sensor which is integrated in a semiconductor substrate and enables measurement of a magnetic field component. perpendicularly to the surface of the semiconductor substrate. The Hall effect sensor comprises several Hall elements having an electrically conductive semiconductor region which has a straight-line row of electrical measuring and control contacts on an end face on the substrate surface. The Hall elements are designed or can be operated in such manner that they have a sensitivity both to a magnetic field component parallel to and the magnetic field component perpendicular to the substrate surface of the semiconductor substrate (). Several of the Hall elements are arranged such that their sensitivity to a magnetic field component parallel to the substrate surface of the semiconductor substrate can be compensated mutually by circuitry or in a signal evaluation. In this way, a sensitivity of these Hall elements to the magnetic field component perpendicular to the substrate surface of the semiconductor substrate is obtained. By using these Hall elements for measuring the magnetic field component perpendicularly to the substrate surface, a very low sensitivity to mechanical stresses can be achieved.

Hall sensor with hall elements measuring magnetic field components perpendicularly to the substrate surface

In a method for calibrating the sensitivity of a monoaxial or multiaxial magnetic field sensor, the magnetic field sensor is exposed consecutively to at least three magnetic fields having different magnetic field vectors which may be freely orientated in space so that they span an oblique coordinate system. The magnetic fields are measured with the magnetic field sensor in order to obtain a sensitivity vector in the oblique coordinate system of the magnetic field vectors for each sensor axis. The sensitivity vectors are transformed into an orthogonal coordinate system via a transformation matrix, and sensitivity and transverse sensitivity of each sensor axis are then calculated on the basis of the transformed sensitivity vectors either directly or following a further transformation. The method enables rapid, precise calibration of all sensitivities of a magnetic field sensor, since it does not require any orthogonal magnetic fields.

Method for calibrating the sensitivity of monoaxial or multiaxial magnetic field sensors

A method of positioning a component arranged on a substrate includes providing a substrate having at least one device for sensing an electromagnetic field arranged thereat, generating a dedicated conductive-trace structure on the substrate, the dedicated conductive-trace structure being provided for the purpose of generating an electromagnetic field having a known field distribution, applying an electric voltage to the dedicated conductive-trace structure, so that the dedicated conductive-trace structure generates the electromagnetic field having the known field distribution, and sensing the generated electromagnetic field having the known field distribution by means of the device for sensing an electromagnetic field. According to the method, the location of the component in relation to the substrate is determined on the basis of the above-mentioned sensing of the electromagnetic field having the known field distribution.

Method and device for positioning a component arranged on a substrate

The invention relates to a method for examining a magnetic field source. In this case, the magnetic vector field emanating from the magnetic field source is detected in a first coordinate system and corresponding magnetic field data is generated. Furthermore, the geometrical body of the magnetic field source is geometrically detected in a second coordinate system and corresponding geometrical data is generated. Subsequently, the first and the second coordinate systems are transferred into a mutual coordinate system by means of a coordinate transformation and the magnetic field data and the geometrical data are combined within the mutual coordinate system in order to place the magnetic vector field of the magnetic field source and the geometrical body of the magnetic field source into a mutual positional relationship.

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Erlangen, Germany

Philip Beran