Asml Netherlands B.v.

Petrus Mathijs Henricus Vosters

Martinus Arnoldus Henricus Terken

Mark Scholten

Rody Koops

Franciscus Stadhouders

Ilya Malakhovskiy

Martinus Josephus Theodorus Maria Cortenbach

A method for radiation beam welding of a first member to a second member of a cooling body for an electromagnetic actuator. The first member on a side thereof comprises a surface portion provided with a recess, which is delimited by a periphery, and wherein the second member comprises a substantially continuous first surface portion complementary to the surface portion of the first member in order to close off the recess, the second member being provided with a second surface portion opposite to the first surface portion. The method comprising arranging the first and second member such that the first surface portion engages with the surface portion of the first member; providing a radiation beam, directing the radiation beam towards the second surface portion such that the first and second member are welded together at the periphery of the recess.

Radiation beam welding method, body and lithographic apparatus

An actuator includes a coil; a cooling body configured to cool the coil; a quantity of heat transfer material fixedly arranged between the cooling body and the coil, and a mechanical attacher configured to attach the coil to the cooling body.

Actuator, lithographic apparatus, and actuator constructing method

An actuator is configured to produce a displacement force between a first and a second part to displace the first and second parts relative to each other. The Actuator includes a first magnet subassembly, attached to one of a first and a second part, and an electrically conductive element, attached to the other one of the first and second part and placed near the first magnet subassembly. The first magnet subassembly includes at least one set of at least two adjacently placed magnets oriented such that their magnetic polarizations are substantially mutually opposite, and a back mass made out of a magnetic flux guiding material and connecting the magnets to guide a magnetic flux there between. The first magnet subassembly includes a carrier made of a non-magnetic-flux-guiding material, the carrier including at least one recess in which the at least one set of back mass and magnets is embedded.

Lithographic apparatus having a Lorentz actuator with a composite carrier

Lithographic apparatus having a lorentz actuator with a composite carrier

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Bladel, Netherlands

Petrus Mathijs Henricus Vosters