Fei Comapny

Petrus Henricus Antonius Mutsaers

Erik René Kieft

Otger Jan Luiten

Alexander Henstra

Wouter Verhoeven

Jasper Frans Mathijs Van Rens

Fredericus Bernardus Kiewiet

Edgar Jan Dirk Vredenbregt

Adam Christopher Lassise

An apparatus for performing charged particle spectroscopy, comprising:

Time-of-flight charged particle spectroscopy

The invention relates to a charged-particle microscope comprising The beam pulsing device comprises a unitary resonant cavity disposed about a particle-optical axis and has an entrance aperture and an exit aperture for the beam. The resonant cavity is configured to simultaneously produce a first oscillatory deflection of the beam at a first frequency in a first direction and a second oscillatory deflection of the beam at a second, different frequency in a second, different direction. The resonant cavity may have an elongated (e.g. rectangular or elliptical) cross-section, with a long axis parallel to said first direction and a short axis parallel to said second direction.

Beam pulsing device for use in charged-particle microscopy

Growing community of inventors

Geldrop, Netherlands

Petrus Henricus Antonius Mutsaers