Koninklijke Philips Corporation N.v.

Asml Netherlands B.v.

Petrus Cm Frissen

Erik Roelof Loopstra

Johan Cornelis Compter

Antonius Ta Peijnenburg

A positioning device comprising a first part () which is movable relatively to a second part () in an X-direction and a Y-direction, said first part () comprising a carrier () on which a system of magnets () is arranged according to a pattern of rows () and columns () extending parallel to the X-direction and the Y-direction, respectively. The magnets in each row and column are arranged according to a Halbach array, i.e. the magnetic orientation of successive magnets in each row () and each column () rotates 90&#xb0; counter-clockwise. The second part () comprises an electric coil system () with two types of electric coils (C, C), one type having an angular offset of +45&#xb0;, and the other type having an offset of &#x2212;45&#xb0; with respect to the X-direction. The magnet configuration causes a very strong magnetic field.

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Eindhoven, Netherlands

Petrus Cm Frissen