Koninklijke Philips Corporation N.v.

Asml Netherlands B.v.

Petrus C M Frissen

Erik Roelof Loopstra

Jan Van Eijk

Johan Cornelis Compter

Antonius T A Peijnenburg

A lithographic apparatus has a positioning system for positioning an object table. The positioning system includes a planar motor having a stator and a translator, one comprising a periodic magnet structure and the other comprising a plurality of coils. The phase relationship between the stator and translator is determined by energizing at least some of the coils with an oscillating signal sufficient to cause vibrations of the translator, measuring the vibrations, and determining the phase relationship between the translator and stator on the basis of the measured vibrations. Alternatively, the relationship between stator and translator may be determined by detecting distinct optical marks on the periodic magnet array.

Lithographic projection apparatus positioning system, method of manufacturing, device manufactured thereby and computer program

A positioning device comprising a first part ( ) which is movable relatively to a second part ( ) in an X-direction and a Y-direction, said first part ( ) comprising a carrier ( ) on which a system of magnets ( ) is arranged according to a pattern of rows ( ) and columns ( ) extending parallel to the X-direction and the Y-direction, respectively. The magnets in each row and column are arranged according to a Halbach array, i.e. the magnetic orientation of successive magnets in each row ( ) and each column ( ) rotates 90&deg; counter-clockwise. The second part ( ) comprises an electric coil system ( ) with two types of electric coils (C , C ), one type having an angular offset of &plus;45&deg;, and the other type having an offset of &minus;45&deg; with respect to the X-direction. The magnet configuration causes a very strong magnetic field.

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Beek, Netherlands

Petrus C M Frissen