Vti Technologies Oy

Murata Electronics Oy

Continental Teves, Ag and Company Ohg

Petri Klemetti

Anssi Blomqvist

Altti Torkkeli

Kaisa Nera

Antti Lipsanen

Stefan Günthner

Bernhard Schmid

Roland Hilser

Ramnath Sivaraman

A method and apparatus for the precise measuring operation of a micromechanical rotation rate sensor, including at least one deflectively suspended seismic mass, at least one drive device for driving the seismic mass, and at least one first and one second trimming electrode element, which are jointly assigned directly or indirectly to the seismic mass, a first electrical trimming voltage (U, U, U) being set between the first trimming electrode element and the seismic mass, and a second electrical trimming voltage (U, U, U) being set between the second trimming electrode element and the seismic mass, the first and the second electrical trimming voltages being set at least as a function of a quadrature parameter (U) and a resonance parameter (U).

Method for the precise measuring operation of a micromechanical rotation rate sensor

The invention relates to measuring devices to be used in the measuring of angular velocity and, more precisely, to vibrating micromechanical sensors of angular velocity. In a sensor of angular velocity according to the invention, a mass is supported to the frame of the sensor component by means of an asymmetrical spring structure (), (), (), (), (), () in such a way, that the coupling from one mode of motion to another, conveyed by the spring (), (), (), (), (), (), cancels or alleviates the coupling caused by the non-ideality due to the skewness in the springs or in their support. The structure of the sensor of angular velocity according to the invention enables reliable measuring with good performance, particularly in small vibrating micromechanical solutions for sensors of angular velocity.

Vibrating micromechanical sensor of angular velocity

Growing community of inventors

Klaukkala, Finland

Petri Klemetti