Average Co-Inventor Count = 2.35
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Infineon Technologies Ag (4 from 14,705 patents)
4 patents:
1. 11195695 - Ion implantation method, ion implantation apparatus and semiconductor device
2. 10096507 - Thin substrate electrostatic chuck system and method
3. 9601363 - Thin substrate electrostatic chuck system and method
4. 9030797 - Thin substrate electrostatic chuck system and method