Brookhaven Science Associates, Lcc

University of California

Peter Z Takacs

Valeriy V Yashchuk

Wayne R McKinney

Shinan Qian

The present invention provides for test surfaces and methods for calibration of surface profilometers, including interferometric and atomic force microscopes. Calibration is performed using a specially designed test surface, or the Binary Pseudo-random (BPR) grating (array). Utilizing the BPR grating (array) to measure the power spectral density (PSD) spectrum, the profilometer is calibrated by determining the instrumental modulation transfer function (IMTF).

Test surfaces useful for calibration of surface profilometers

The present invention is a beam splitter for splitting an incident beam into first and second beams so that the first and second beams have a fixed separation and are parallel upon exiting. The beam splitter includes a first prism, a second prism, and a film located between the prisms. The first prism is defined by a first thickness and a first perimeter which has a first major base. The second prism is defined by a second thickness and a second perimeter which has a second major base. The film is located between the first major base and the second major base for splitting the incident beam into the first and second beams. The first and second perimeters are right angle trapezoidal shaped. The beam splitter is configured for generating equal optical path length beams.

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Riverhead, NY, United States of America

Peter Z Takacs