Other

Aerojet Rocketdyne, Inc.

Peter Young Peterson

Richard M Laine

Dean Richard Massey

Justin Matthew Pucci

David Quimby King

The invention is generally related to process for generating one or more molecules having the formula SiH, SiD, SiHD, and mixtures thereof, where x,y and z are integers &#x2267;1, H is hydrogen and D is deuterium, such as silane, comprising the steps of: providing a silicon containing material, wherein the silicon containing material includes at least 20 weight percent silicon atoms based on the total weight of the silicon containing material; generating a plasma capable of vaporizing a silicon atom, sputtering a silicon atom, or both using a plasma generating device; and contacting the plasma to the silicon containing material in a chamber having an atmosphere that includes at least about 0.5 mole percent hydrogen atoms and/or deuterium atoms based on the total moles of atoms in the atmosphere; so that a molecule having the formula SiH; (e.g., silane) is generated. The process preferably includes a step of removing one or more impurities from the SiH(e.g., the silane) to form a clean SiH, SiD, SiHD(e.g., silane). The process may also include a step of reacting the SiH, SiD, SiHD(e.g., the silane) to produce a high purity silicon containing material such as electronic grade metallic silicon, photovoltaic grade metallic silicon, or both.

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Saline, MI, United States of America

Peter Young Peterson