Meta Platforms Technologies, LLC

Peter Topalian

Giuseppe Calafiore

Ankit Vora

Tingling Rao

Kavous Jorabchi

A device for determining coplanarity of two surfaces includes an illumination system for providing first light to a first surface and providing second light to a second surface. The first surface redirects at least a portion of the first light and the second surface redirects at light a portion of the second light. The device also includes an optical detector positioned to receive an overlap of the redirected portion of the first light and the redirected portion of the second light. An image of the overlap of the redirected portion of the first light and the redirected portion of the second light indicates coplanarity of the first surface and the second surface.

Optical alignment for ultra-high coplanarity of two planes

The disclosure provides high refractive index ceramic material nanoimprint lithography (NIL) gratings having a relatively lower amount of carbon compared to traditional NIL gratings, and methods of making and using thereof, and devices including such gratings. The ceramic material includes one or more of titanium oxide, zirconium oxide, hafnium oxide, tungsten oxide, zinc tellurium, gallium phosphide, or any combination or derivative thereof.

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Seattle, WA, United States of America

Peter Topalian