Epcos Ag

Tdk Electronics Ag

Peter Thiele

Christian Wohlgemuth

A pressure sensor () is specified, comprising a housing (), a membrane (), which forms with the housing () a chamber () closed off toward the outside, and a filling opening () for filling the chamber () with a fluid medium (). The filling opening () is closed by means of a soldering or welding closure (). Furthermore, a method for producing a pressure sensor () is specified, wherein a housing (), which together with a membrane () forms a chamber (), is provided, the chamber () is filled with a fluid medium () through a filling opening (), and the filling opening () is subsequently closed by means of soldering or welding.

Pressure sensor and method for producing a pressure sensor

A pressure sensor has a substrate with conductor tracks for contact-connecting electrical components. The pressure sensor has a measuring element for converting a mechanical measurement variable into an electrical signal and a signal converter for processing the electrical signals from the measuring element further. Furthermore, the pressure sensor has a first diaphragm which, together with the substrate, forms a first closed cavity which contains an inert filling medium. At least one side of the measuring element of the pressure sensor, which comprises an active surface, has direct contact with the filling medium in the first cavity. The signal converter is arranged on the substrate in the form of an unhoused integrated circuit.

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Berlin, Germany

Peter Thiele