Air Products and Chemicals, Inc.

Peter T Randtke

Hans-Juergen Graf

Robert E Fletcher

Bruce A Lipisko

Richard E Howard

John C Schumacher

Adrian Sandu

Bruce E Rhine

J R Monkowski

A container for high purity chemicals has a quartz or glass breakseal tube, the end of the tube interior of the container forming a thin annular edge, and a glass or quartz disk fused to said thin annular edge closing the tube. The glass or quartz tube is constructed and adapted to receive, in use, an inner tube disposed in the glass or quartz tube; the disk, glass or quartz tube being of such construction that, in use, the disk is broken off the thin annular edge upon application of force thereto by the inner tube.

Ultra high purity reagent container with large breakseal

A system for automatically filling a bubbler, or other vapor delivery system from a reservoir, is disclosed in which the conduit system is purged and pressurized with inert gas, using a unique refill reservoir, level sensing and valving system.

Chemical refill system

A vacuum vapor transport control system and method for controlling the rate of vapor flow from a reagent reservoir into a vacuum system through an orifice calibrated as to size or flow rate using a high purity fixed gas and vapor provided from multiple reservoirs or mixed vapor provided from a single reservoir.

Vacuum vapor transport control

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San Marcos, CA, United States of America

Peter T Randtke