Thermo Electron Scientific Instruments Corporation

Peter Steinberg

William A Bayer

William Robert Keefe

Min Yan

Gang Feng

An embodiment of a microscope system is described that comprises a sample stage configured to position a sample; and a spectrometer comprising an interferometer configure to provide a light beam to the sample stage and one or more detectors configured to detect light spectra in response to the light beam, wherein the spectrometer sends a notification to the sample stage after a scan comprising an acceptable measure of quality has been acquired from the detected light spectra at a first location, and the sample stage is further configured to count the notifications and initiate movement of the sample stage to a second location when a count value reaches a pre-determined number.

System and method for synchronized stage movement

An optical measurement system measurement system for examining a sample. The measurement system comprises an internally reflective element, a stage, an optical assembly, a chassis, and a sensor. The internally reflective element has a contact surface. The stage is positioned below the internally reflective element. The stage and the internally reflective element are configured to apply a force to the sample. The optical assembly comprises a light source and a light detector. The optical assembly is configured to scan the sample by directing source light from the light source towards the contact surface and detecting source light optically interacting with the contact surface by the light detector. The chassis is configured to support the optical assembly and the internally reflective element. The sensor is mounted to the chassis and configured to detect the force applied to the sample by the internally reflective element and the stage.

Method and apparatus for determining a force applied to a sample during an optical interrogation technique

A measurement system configured to examine a sample. The system comprises an internally reflective element, a contact member, an actuator, an optical assembly, a sensor, and a controller. The contact member and the reflective element are configured to apply a force to the sample. The optical assembly is configured to scan the sample. Whereby prior to the scan, an initial force is applied to the sample, and after the scan, a resulting force is applied to the sample. The sensor is configured to detect the resulting force applied to the sample, and the controller is configured to receive a signal from the sensor indicative of the detected resulting force. The controller is further configured to control the actuator to adjust the force applied to the sample by the contact member and the internally reflective element from the resulting force to the initial force.

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Madison, WI, United States of America

Peter Steinberg