Applied Materials, Inc.

Applied Materials Gmbh & Co Kg

Peter Skuk

Stefan Hein

Neil Morrison

Gerd Hoffmann

Hans-Georg Lotz

Reiner Kukla

Rainer Ludwig

Peter Sauer

Karl-Heinz Wenk

Andre Herzog

An evaporator contains a heating tube, a heat exchanger for cooling the heating tube, and a means for generating an aerosol. The heat exchanger contains at least two cooling pipes, where the at least two cooling pipes are arranged such that each of the at least two cooling pipes is in physical contact with the heating tube. The means for generating the aerosol is coupled to the at least two cooling pipes.

Heat exchanger for cooling a heating tube and method thereof

A heat exchanger for cooling a heating tube is described, comprising at least two cooling pipes, wherein the at least two cooling pipes are arranged such that each of the at least two cooling pipes are configured to be in thermal contact with the heating tube; and a means for generating an aerosol being configured to provide the aerosol in the at least two cooling pipes.

An evaporator for vaporizing an organic material to be deposited on a flexible substrate where the evaporator includes an evaporation tube having a wall encompassing a cavity for vaporizing the organic material, at least one heating device arranged adjacent to the wall and being adapted to heat the evaporation tube, and at least one nozzle assembly protruding from the evaporation tube. The nozzle assembly further comprises a nozzle cover with an opening, and a shutter for selectively opening and closing the opening of the nozzle cover. The shutter is adapted to have in operation of the evaporation tube a temperature within a shutter temperature range of 140&#xb0; C. such that the temperature of the nozzle cover is within the shutter temperature range.

Evaporator for organic materials and method for evaporating organic materials

A guide arrangement () for guiding webs in evacuatable web treatment installations comprises at least one guide roller () with an axis (), whose spatial position is settable. To solve the problem of compensating in modular installations with several chambers either misalignments of the chambers relative to one another and/or to avoid completely adjustable roller frames, whose adjustment would require the repositioning of treatment and coating sources and of separating gaps on the circumference of coating rollers, the invention proposes that the guide roller () is supported between two pivot bearings (), of which at least one is adjustable relative to the other transversely to the axis (). This is preferably carried out thereby that the adjustable pivot bearing () comprises a slide guide (), fastened to a chamber wall (), on which a slide () with the pivot bearing () is guided, and that the adjustable pivot bearing () comprises a remotely operated adjustment drive ().

Guide arrangement with at least on guide roller for the guidance of webs in webs treatment installations

A web coating apparatus with a vacuum chamber () has between a rear wall () and at least one removable closing plate (), housing member () with a planar cover (), and at least one guide roll () and a coating cylinder () with an axle (A) and at least one coating source (a,b,c) are arranged in the vacuum chamber (). To reduce structural height and width and to achieve an easily viewable and controllable web path while avoiding particle formation in the reach of the coating cylinder (), provision is made pursuant to the invention that the ends of the at least one guide roll () and of the coating cylinder are affixed by supporting elements (and) with bearings to the cover () and that the cavity in the vacuum chamber () under the coating cylinder () is kept free of supporting elements. At the same time it is possible to mount the at least one guide roll () and the coating cylinder () with their ends remote from the closing plate () on the rear wall (), or, alternatively, to journal the at least one guide roll () and the coating cylinder () on supporting elements in front of the rear wall () and hold it onto the cover ().

Web coating apparatus with a vacuum chamber and a coating cylinder

A measuring device includes several sequentially disposed coating chambers for measuring optical properties of coated substrates. These coating chambers are separated from one another by partitioning walls, whose free ends are located closely above the substrate. The substrate is preferably a continuous film. By measuring the reflection, the transmission, etc. of the substrate between the individual coating chambers, it becomes possible to carry out measurements within only partially completed layer systems. This yields advantages for the technical operation control of the coating process.

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Nidderau, Germany

Peter Skuk