Applied Materials Gmbh & Co Kg

Applied Films Gmbh & Co. Kg

Peter Sauer

Hans-Georg Lotz

Stefan Hein

Gerd Hoffmann

Rainer Ludwig

Peter Skuk

Gerhard Steiniger

Jürgen Ulrich

A sputtering cathode () for coating processes in a vacuum chamber () comprises one at least single-piece target plate () mounted on a metallic diaphragm (). On the side of the diaphragm () facing away from the target plate () is disposed a cooling agent channel with an inflow line () and an outflow line () for a cooling agent and a hollow space () for at least one magnet system (). The magnet system () is disposed in a supporting tub () sealed against the diaphragm () and not exposed to the cooling agent. The entire configuration is disposed on a supporting structure (). In order to improve the heat transfer from the target plate () to the cooling agent in simple, efficient and cost-effective manner and to avoid the hazard of the cooling agent penetrating into the vacuum chamber, the invention provides that

Sputtering cathode for coating processes

A measuring device includes several sequentially disposed coating chambers for measuring optical properties of coated substrates. These coating chambers are separated from one another by partitioning walls, whose free ends are located closely above the substrate. The substrate is preferably a continuous film. By measuring the reflection, the transmission, etc. of the substrate between the individual coating chambers, it becomes possible to carry out measurements within only partially completed layer systems. This yields advantages for the technical operation control of the coating process.

Measuring device for the measurement of optical properties of coated substrates

A material with spectrally selective reflection in the primary valences of red, green and blue is applied preferably onto laser projection screens in order to make possible the projection even in daylight. In a first embodiment, a first layer of a material that is highly reflective over the entire range of visible light, e.g., aluminum is applied onto a substrate, e.g., glass or a synthetic material, followed by a second layer of a material that is essentially non-absorbing over the entire range of visible light, e.g., SiO. A third layer in contact with air is applied to the second layer and is made of a material that is partially transmissive over the entire range of visible light, e.g., of NiCr An alternative embodiment comprise five layers, The first layer is made a material with a high index of refraction, e.g.; TiO, a second of a material with a low index of refraction, e.g., SiO, the third of a material with a high index of refraction, e.g., TiO: a fourth of a material with a low index of refraction. e.g., SiO, and a fifth layer of a material with a high index of refraction, e.g., TiO.

Material with spectrally selective reflection

Growing community of inventors

Schluchtern, Germany

Peter Sauer